Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices

Applied Optics

Volumn 43, Issue 23, 2004, Pages 4584-4589

  Giridhar, Malalahalli S ^a   Seong, Kibyung ^a   Schülzgen, Axel ^a   Khulbe, Pramod ^a   Peyghambarian, Nasser ^a   Mansuripur, Masud ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EVAPORATION; FLUIDICS; GLASS; LASER PULSES; LIGHT ABSORPTION; LITHOGRAPHY; MICROMACHINING; MICROSTRUCTURE; PHOTONS; SAPPHIRE; SUBSTRATES; TITANIUM;

BULK GLASS; OPEN CHANNELS; PULSED LASER MICROMACHINING; SUBSURFACE MICROMACHINING;

LASER BEAM EFFECTS;

EID: 4344593980     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.004584     Document Type: Review

References (14)

1. K. Minoshima, A. M. Kowalevicz, I. Hartl, E. P. Ippen, and J. G. Fujimoto, "Photonic device fabrication with femtosecond laser oscillators," Opt. Photon. News 14, 44-49 (2003).
2. K. Minoshima, A. M. Kowalevicz, E. P. Ippen, and J. G. Fujimoto, "Fabrication of coupled mode photonic devices in glass by nonlinear femtosecond laser materials processing2C" Opt. Express 10, 645-652 (2002), http://www.opticsexpress.org.
3. C. B. Schaffer, A. Brodeur, J. F. Garcia, and E. Mazur, "Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy," Opt. Lett. 26, 93-95 (2001).
4. N. Bloembergen, "Laser-induced electric breakdown in solids," IEEE J. Quantum Electron. QE-10, 375-386 (1974).
5. P. P. Pronko, S. K. Dutta, D. Du, and R. K. Singh, "Thermo-physical effects in laser processing of materials with picosecond and femtosecond pulses," J. Appl. Phys. 78, 6233-6240 (1995).
6. X. Liu, D. Du, and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. 33, 1706-1716 (1997).
7. C. B. Schaffer, A. Brodeur, and E. Mazur, "Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses," Meas. Sci. Technol. 12, 1784-1794 (2001).
8. Y. Li, K. Itoh, W. Watanabe, Kazuhiro Yamada, D. Kuroda, J. Nishii, and Y. Jiang, "Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses," Opt. Lett. 26, 1912-1914 (2001).
9. H. Bayley and P. S. Cremer, "Stochastic sensors inspired by biology," Nature 413, 226-230 (2001).
10. E. Southern, K. Mir, and M. Shchepinov, "Molecular interactions on microarrays," Nat. Genet. 21, 1-5 (1999).
11. P. J. A. Kenis, R. F. Ismagilov, and G. M. Whitesides, "Micro-fabrication inside capillaries using multiphase laminar flow patterning," Science 285, 83-85 (1999).
12. J. C. McDonald, S. J. Metallo, and G. M. Whitesides, "Fabrication of a configurable, single-use microfluidic device," Anal. Chem. 73, 5645-5650 (2001).
13. T. Thorsen, S. J. Maerlk, and S. R. Quake, "Microfluidic large-scale integration," Science 298, 580-584 (2002).
14. C. Chen, D. Hirdes, and A. Folch, "Gray-scale photolithography using microfluidic photomasks," Proc. Natl. Acad. Sci. USA 100, 1499-1504 (2003).