SCOPUS 정보 검색 플랫폼

Volumn 248, Issue 1-4, 2005, Pages 172-176

Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications

Author keywords

3D microfabrication; Femtosecond laser; Lab on a chip; Photoetchable glass

Indexed keywords

ABSORPTION; ANNEALING; GLASS; LASER PULSES; MICROPROCESSOR CHIPS; OPTIMIZATION; PHOTONS; THERMAL EFFECTS;

3D MICROFABRICATION; FEMTOSECOND LASERS; LAB-ON-A-CHIP; PHOTOETCHABLE GLASS;

MICROSTRUCTURE;

EID: 19944372077 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2005.03.078 Document Type: Conference Paper

Times cited : (67)

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