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Applied Physics A: Materials Science and Processing

Volumn 83, Issue 1, 2006, Pages 27-29

Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses

(6) An, R a Li, Y a Dou, Y a Liu, D a Yang, H a Gong, Q a

a PEKING UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

DRILLING; FUSED SILICA; LASER ABLATION; LASER PULSES; SCANNING ELECTRON MICROSCOPY;

FEMTOSECOND LASERS; HIGH SPEED EFFECTS; MICROFLUIDIC CHAMBERS;

FLUIDIC DEVICES;

EID: 32144439797 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-005-3456-1 Document Type: Article

Times cited : (43)

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