Zinc oxide (ZnO) grown on flexible substrate using dual-plasma-enhanced metalorganic vapor deposition (DPEMOCVD)

Surface and Coatings Technology

Volumn 206, Issue 14, 2012, Pages 3258-3263

  Lei, Po Hsun ^a   Wu, Hsiang Ming ^a   Hsu, Chia Ming ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

Dual plasma enhanced metalorganic chemical vapor deposition (DPEMOCVD); Polyestersulfone (PES); Zinc oxide (ZnO)

Indexed keywords

CRYSTALLINE STRUCTURE; DC PLASMA; DEPOSITION TEMPERATURES; DIRECT VOLTAGES; DUAL PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR DEPOSITION (DPEMOCVD); FLEXIBLE SUBSTRATE; METAL-ORGANIC; OPTICAL AND ELECTRICAL PROPERTIES; OPTIMUM DEPOSITION; POLYESTERSULFONE (PES); RADIO FREQUENCY PLASMA; RF PLASMA; SUPERHYDROPHILIC SURFACE; TEMPERATURE DEPENDENCE; UV IRRADIATION; WATER CONTACT ANGLE; WETTABILITY CHARACTERISTICS; ZNO; ZNO FILMS; ZNO THIN FILM;

CONTACT ANGLE; DC POWER TRANSMISSION; ELECTRIC PROPERTIES; ESTERS; METALLIC FILMS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTICAL FILMS; PLASMA DEVICES; PLASMA THEORY; X RAY DIFFRACTION; ZINC OXIDE;

SUBSTRATES;

EID: 84862825536     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.01.023     Document Type: Article

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