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Applied Surface Science

Volumn 257, Issue 16, 2011, Pages 7119-7122

Low-temperature deposited ZnO thin films on the flexible substrate by cathodic vacuum arc technology

(5) Yang, Ru Yuan a Weng, Min Hang b Pan, Cheng Tang c Hsiung, Chin Min a Huang, Chun Chih a

a NATIONAL PINGTUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY (Taiwan)

b METAL INDUSTRIES RESEARCH AND DEVELOPMENT CENTRE (Taiwan)

c NATIONAL SUN YAT SEN UNIVERSITY (Taiwan)

Author keywords

Cathodic vacuum arc; PET; Thin film; ZnO

Indexed keywords

ENERGY GAP; II-VI SEMICONDUCTORS; LIGHT TRANSMISSION; METALLIC FILMS; OXIDE FILMS; POLYETHYLENE TEREPHTHALATES; SUBSTRATES; TEMPERATURE; VACUUM APPLICATIONS; VACUUM TECHNOLOGY; ZINC OXIDE;

CALCULATED VALUES; CATHODIC VACUUM ARC TECHNIQUE; CATHODIC VACUUM ARCS; DOPED ZINC OXIDES; FLEXIBLE SUBSTRATE; LOW TEMPERATURES; OPTICAL AND ELECTRICAL PROPERTIES; OPTICAL TRANSMISSION SPECTRUM;

THIN FILMS;

EID: 79955629314 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2011.03.065 Document Type: Article

Times cited : (22)

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