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Volumn 496, Issue 1, 2006, Pages 112-116

Low-temperature deposition of ZnO thin films on PET and glass substrates by DC-sputtering technique

(8) Banerjee, A N a,d Ghosh, C K a Chattopadhyay, K K a Minoura, Hideki b Sarkar, Ajay K c Akiba, Atsuya c Kamiya, Atsushi c Endo, Tamio c

a JADAVPUR UNIVERSITY (India)

b GIFU UNIVERSITY (Japan)

c MIE UNIVERSITY (Japan)

d UNIVERSITY OF NEVADA (United States)

Author keywords

Conductivity; Direct current sputtering; Flexible display; Low substrate temperature; Polyethylene terephthalate; Transmittance; ZnO

Indexed keywords

CARRIER CONCENTRATION; DEPOSITION; ELECTRIC CONDUCTIVITY; GLASS; HALL EFFECT; MAGNETRON SPUTTERING; POLYETHYLENE TEREPHTHALATES; SUBSTRATES; X RAY DIFFRACTION; ZINC OXIDE;

DIRECT-CURRENT SPUTTERING; FLEXIBLE DISPLAY; LOW-SUBSTRATE TEMPERATURE; TRANSMITTANCE;

THIN FILMS;

EID: 28044448963 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.08.258 Document Type: Conference Paper

Times cited : (201)

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