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Volumn , Issue , 2011, Pages 784-787
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Quasi-linear frequency tuning for CMOS-MEMS resonators
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITIVE RESONATORS;
CMOS-MEMS;
DC POWER CONSUMPTION;
DC VOLTAGE;
FREQUENCY DEPENDENCE;
FREQUENCY-TUNING;
LINEAR TEMPERATURE;
LOW POWER;
METAL MATERIALS;
METAL STRUCTURES;
QUASI-LINEAR;
TEMPERATURE COEFFICIENT;
TEMPERATURE COMPENSATION;
TEMPERATURE RANGE;
TIMING REFERENCES;
TO EFFECT;
TUNING CAPABILITY;
TUNING RANGES;
VOLTAGE-CONTROLLED;
YOUNG'S MODULUS;
DC POWER TRANSMISSION;
ION SENSITIVE FIELD EFFECT TRANSISTORS;
MECHANICAL ENGINEERING;
MECHANICS;
MEMS;
MICROELECTROMECHANICAL DEVICES;
REACTIVE ION ETCHING;
RESONATORS;
SILICON COMPOUNDS;
TEMPERATURE DISTRIBUTION;
TUNING;
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EID: 79953768196
PISSN: 10846999
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/MEMSYS.2011.5734542 Document Type: Conference Paper |
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Times cited : (7)
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References (9)
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