Temperature-compensated high-stability silicon resonators

Applied Physics Letters

Volumn 90, Issue 24, 2007, Pages

  Melamud, Renata ^a   Kim, Bongsang ^a   Chandorkar, Saurabh A ^a   Hopcroft, Matthew A ^a   Agarwal, Manu ^a   Jha, Chandra M ^a   Kenny, Thomas W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HERMETIC DEVICES; MICROMECHANICS; QUARTZ CRYSTAL MICROBALANCES; SILICA; THERMAL EFFECTS;

RESONATOR STRUCTURE; SILICON DIOXIDE COATINGS; SILICON RESONATORS;

CRYSTAL RESONATORS;

EID: 34250632859     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2748092     Document Type: Article

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