CMOS-MEMS resonant mixer-filters

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 2005, Issue , 2005, Pages 274-277

  Fedder, Gary K ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); FREQUENCY MODULATION; MEMS; MICROMACHINING; MICROPROCESSOR CHIPS; MIXER CIRCUITS;

ELECTROSTATIC VOLTAGE SQUARED NONLINEARITY; MECHANICAL RESONANCE; RESONANT MIXER FILTERS; RF SIGNAL OUTPUT;

CMOS INTEGRATED CIRCUITS;

EID: 33748806887     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. A.-C. Wong and C.T.-C. Nguyen, "Micromechanical mixer-filters ("mixlers"), J. Microelectromechanical Systems, v.13, no.1, Feb. 2004.
2. B. Razavi, "RF CMOS transceivers for cellular telephony," IEEE Communications Mag., Aug 2003, pp. 144-9.
3. G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu and L. R. Carley, "Laminated high-aspect-ratio structures in a conventional CMOS process," Sensors & Actuators A, v. 57, no. 2, 1997, pp. 103-10.
4. F. Chen, J. Brotz, U. Arslan, C.-C. Lo, T. Mukherjee and G. K. Fedder, "CMOS-MEMS resonant RF mixer-filters," IEEE MEMS, Miami Beach, FL, Jan.-Feb. 2005, pp. 24-7.
5. A. Oz and G. K. Fedder, "CMOS electrothermal lateral micromovers for actuation and self-assembly," SEM Conf. on Exper.and Applied Mechanics, Charlotte, NC, June 2003.
6. C.-C. Lo, F. Chen and G. K. Fedder, "Integrated HF CMOS-MEMS square-frame resonators with on-chip electronics and self-assembling narrow gap mechanism," IEEE Transducers '05, Seoul, Korea, June 2005, pp. 2074-7.