Real-time temperature compensation of mems oscillators using an integrated micro-oven and a phase-locked loop

Journal of Microelectromechanical Systems

Volumn 19, Issue 1, 2010, Pages 192-201

  Salvia, James C ^a   Melamud, Renata ^b   Chandorkar, Saurabh A ^a   Lord, Scott F ^c   Kenny, Thomas W ^a  

^a Stanford University   (United States)

^b SiTime Corporation   (United States)

^c Naval Nuclear Power School   (United States)

Author keywords

Frequency stability; Microresonators; Oscillators; Phase locked loops (PLLs)

Indexed keywords

CONSTANT TEMPERATURE; FREQUENCY ERRORS; FREQUENCY REFERENCE; MEMS OSCILLATORS; MICRO RESONATORS; MULTIPOINT; OSCILLATORS; REAL TIME MEASUREMENTS; TEMPERATURE COEFFICIENT; TEMPERATURE COMPENSATION; TIME TEMPERATURE;

DELAY CIRCUITS; FREQUENCY STABILITY; RESONATORS; SPURIOUS SIGNAL NOISE; SYSTEM STABILITY; TEMPERATURE DISTRIBUTION; TIME MEASUREMENT;

PHASE LOCKED LOOPS;

EID: 76349115803     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2035932     Document Type: Article

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