Rotary liquid droplet microbearing

Journal of Microelectromechanical Systems

Volumn 21, Issue 3, 2012, Pages 721-729

  Yoxall, Brian E ^a   Chan, Mei Lin ^a   Harake, Ryan S ^a   Pan, Tingrui ^a   Horsley, David A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Capillary force; friction; liquid bearings; microactuators; microelectromechanical systems (MEMS); rotary stage; superhydrophobic (SHP); surface tension

Indexed keywords

BEARING DESIGNS; BEARING STIFFNESS; CAPILLARY FORCE; EXTERNAL MAGNETIC FIELD; LIQUID BEARINGS; LIQUID DROPLETS; MICRO-BEARINGS; MICROPATTERNED; POLYDIMETHYLSILOXANE PDMS; SINGLE CRYSTAL SILICON; SLIDING FRICTION; SUPERHYDROPHOBIC; SURFACE COATINGS; SURFACE TENSION FORCE;

BALL BEARINGS; CONTACT ANGLE; DRAG COEFFICIENT; DROPS; ELECTROMECHANICAL DEVICES; FRICTION; HYDROPHOBICITY; MAGNETIC FIELDS; MEMS; MICROACTUATORS; SILICONES; STATORS; STIFFNESS; SURFACE TENSION;

ROTORS (WINDINGS);

EID: 84861843566     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2185218     Document Type: Article

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