Low friction liquid bearing MEMS micromotor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 1237-1240

  Chan, Mei Lin ^a   Yoxall, Brian ^a   Park, Hyunkyu ^a   Kang, Zhaoyi ^b   Izyumin, Igor ^b   Chou, Jeffrey ^b   Megens, Mischa M ^b   Wu, Ming C ^b   Boser, Bernhard E ^b   Horsley, David A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUID THICKNESS; HYDROPHOBIC LAYERS; LIQUID BEARINGS; LOW FRICTION; MAGNETIC ACTUATION; MICRO DEVICES; MICRO-MECHANICAL; MICROMOTOR; ROTATION RATE; STATIC FRICTION; SURFACE PATTERNING; VISCOUS FRICTION;

DRAG; LIQUIDS; MECHANICAL ENGINEERING; MECHANICS; MEMS; REACTIVE ION ETCHING; ROTORS; STICTION; TRIBOLOGY;

ROTATION;

EID: 79953804078     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734656     Document Type: Conference Paper

References (10)

1. L. S. Fan, Y. C. Tai, and R. S. Muller," Sensors and Actuators, vol. 20, no. 1-2, pp. 41-47, Nov, 1989.
2. M. Mehregany, S. F. Bart, L. S. Tavrow et al.," Sensors and Actuators a-Physical, vol. 21, no. 1-3, pp. 173-179, Feb, 1990.
3. V. Kaajakari, and A. Lal," Sensors and Actuators a-Physical, vol. 137, no. 1, pp. 120-128, Jun, 2007.
4. C. H. Ahn, Y. J. Kim, and M. G. Allen," Journal of Microelectromechanical Systems, vol. 2, no. 4, pp. 165-173, December, 1993.
5. N. Ghalichechian, A. Modafe, M. I. Beyaz et al.," Journal of Microelectromechanical Systems, vol. 17, no. 3, pp. 632-642, Jun, 2008.
6. L. G. Frechette, S. A. Jacobson, K. S. Breuer et al.," Journal of Microelectromechanical Systems, vol. 14, no. 1, pp. 141-152, Feb, 2005.
7. S. Kumar, D. Cho, and W. N. Carr," Journal of Microelectromechanical Systems, vol. 1, no. 1, pp. 23-30, March, 1992.
8. X. S. Wu, W. Y. Chen, X. L. Zhao et al.," Electronics Letters, vol. 40, no. 16, pp. 996-997, Aug, 2004.
9. A. Takei, N. Binh-Khiem, E. Iwase et al.," MEMS '08, Tucson, AZ, 2008, pp. 42-45.
10. A. Kajiwara, K. Suzuki, H. Miura et al.," Research Reports of Kogakuin University, no. 101, pp. 25-30, October, 2006.