Liquid motor driven by electrowetting

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 42-45

  Takei, A ^a   Binh Khiem, N ^a   Iwase, E ^a   Matsumoto, K ^a   Shimoyama, I ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; DROP FORMATION; DROPS; ELECTRODES; FLUID MECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METALLIZING; MICROELECTROMECHANICAL DEVICES; NONMETALS; OPTICAL INSTRUMENTS; PHOTORESISTS; REACTIVE ION ETCHING; SILICON; SURFACE CHEMISTRY; SURFACE TENSION;

ELECTRO-WETTING; INTERNATIONAL CONFERENCES; LIQUID DROPLETS; MICRO-ELECTRO MECHANICAL SYSTEMS; MINIMUM VALUES; OPTICAL DEVICES; SURFACE ENERGIES; TRANSPARENT MATERIALS;

MOTORS;

EID: 50149107234     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443588     Document Type: Conference Paper

References (8)

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3. S. Yokota et al., "A Micro Motor Using Electroconjugate Fluids (ECFs)," JSME, Series C, Vol. 44, No. 3, pp. 756-62, 2001.
4. S. K. Cho et al., "Creating, Transporting, Cutting and Merging Liquid Droplets by Electrowetting-Based Actuation for Digital Microfluidic Circuits," J. MEMS, Vol. 12, No. 1, pp. 70-80, 2001.
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6. S. Berry et al., "Low Voltage Electrowetting Using Thin Fluoropolymer Films," Journal of Colloid and Interface Science, Vol. 303, pp. 517-524, 2006.
7. A. Takei et al., "Angle Tunable Liquid Wedge Prism Driven by Electro-Wetting," Proceedings of IEEE MEMS, pp. 36-39, 2006.
8. J. F. Joanny and P. G. de Genne, "A Model for Contact Angle Hysteresis," J. Chem. Phys., Vol. 81, No. 1, pp. 552-562, 1984.