Ultrasonically driven surface micromachined motor

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 40-45

  Kaajakari, Ville ^a   Rodgers, Steve ^a   Lal, Amit ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROACTUATORS; MICROMACHINING; PIEZOELECTRIC DEVICES;

ALL-SURFACE MICROMACHINED ULTRASONIC MICRO-ROTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033692516     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (13)