Ultrasonic micromotors based on PZT thin films

Journal of Electroceramics

Volumn 3, Issue 2, 1999, Pages 143-150

  Muralt, Paul ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON; THIN FILMS; ULTRASONIC DEVICES;

BUFFER ELECTRODE; ULTRASONIC ACTUATOR;

PIEZOELECTRIC MATERIALS;

EID: 0032683116     PISSN: 13853449     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1009943110147     Document Type: Article

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