Part tilting in capillary-based self-assembly: Modeling and correction methods

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 1060-1063

  Abbasi, Shaghayegh ^a   Zhou, Andrew X ^a   Baskaran, Rajashree ^a,b   Böhringer, Karl F ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; BINDING SITES; BIOCHEMISTRY; COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NONMETALS; REACTIVE ION ETCHING; SILICON; SURFACE CHEMISTRY; SURFACE TENSION; WATER ANALYSIS;

AQUEOUS ENVIRONMENTS; ASSEMBLY PARAMETERS; CORRECTION METHODS; EXTERNAL ENERGY; FORCE-BALANCE ANALYSIS; HYDROPHOBIC BINDING; INTERFACIAL TENSION; INTERNATIONAL CONFERENCES; MECHANICAL BONDING; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-PARTS; SELF- ASSEMBLIES; SURFACE ENERGY MINIMIZATION; TILT ANGLES; TILT CORRECTIONS; VERTICAL VIBRATIONS;

SELF ASSEMBLY;

EID: 48849113264     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443842     Document Type: Conference Paper

References (8)

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