Photopatternable superhydrophobic nanocomposites for microfabrication

Journal of Microelectromechanical Systems

Volumn 19, Issue 2, 2010, Pages 246-253

  Hong, Lingfei ^a,b   Pan, Tingrui ^a  

^a University of California   (United States)

^b BEIHANG UNIVERSITY   (China)

Author keywords

Microfabrication; Nanocomposite; Nanoparticle; Photolithography; Polytetrafluoroethylene (PTFE); SU 8; Superhydrophobicity

Indexed keywords

FEATURE RESOLUTION; IMMOBILIZATION METHOD; LITHOGRAPHY RESOLUTION; MATRIX; MICROPATTERNS; NANOCOMPOSITE FILM; NANOMORPHOLOGIES; OPTICAL TRANSPARENCY; PHOTO-DEFINABLE; PHOTOPATTERNABILITY; PHOTOPATTERNED; PROCESSABILITY; SPRAY COATING; STANDARD PHOTOLITHOGRAPHY; SU-8; SU-8 PHOTORESIST; SU-8 POLYMER; SUPERHYDROPHOBIC; SUPERHYDROPHOBICITY; TRANSPARENT SUBSTRATE;

CONTACT ANGLE; HYDROPHOBICITY; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; NANOPARTICLES; PHOTORESISTS; PLASTIC COATINGS; SPIN GLASS; TRANSPARENCY;

NANOCOMPOSITES;

EID: 77950581049     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2041189     Document Type: Article

References (66)

1. W. Barthlott and N. Ehler, Raster-Elektronenmikroskopie der Epidermis-Oberflächen von Spermatophyten. Mainz, Germany: Akad. Wiss. Lit., 1997, ser. Trop. Subtrop. Pflanzenwelt 19, p. 105.
2. M. Callies and D. Quere, "On water repellency," Soft Matter 1, pp. 55-61, 2005.
3. M. Nosonovsky, "Multiscale roughness and stability of superhydropho-bic biomimetic interfaces," Langmuir 23, no.6, pp. 3157-3161, Mar. 2007.
4. F. Xia and L. Jiang, "Bio-inspired, smart, multiscale interfacial materials," Adv. Mater. 20, no.15, pp. 2842-2858, Aug. 2008.
5. W. Barthlott and C. Neinhuis, "Purity of the sacred lotus, or escape from contamination in biological surfaces," Planta 202, no.1, pp. 1-8, Apr. 1997.
6. C. Neinhuis and W. Barthlott, "Characterization and distribution of water-repellent, self-cleaning plant surfaces," Ann. Bot. 79, no.6, pp. 667-677, Jun. 1997.
7. X. F. Gao and L. Jiang, "Water-repellent legs of water striders," Nature 432, no.7013, p. 36, 2004.
8. A. R. Parker and C. R. Lawrence, "Water capture by a desert beetle," Nature 414, no.6859, pp. 33-34, Nov. 2001.
9. X. Zhang, H. Kono, Z. Liu, S. Nishimoto, D. A. Tryk, T. Murakami, H. Sakai, M. Abe, and A. Fujishima, "A transparent and photo-patternable superhydrophobic film," Chem. Commun. 46, pp. 4949-4951, 2007.
10. C. H. Choi and C. J. Kim, "Large slip of aqueous liquid flow over a nanoengineered superhydrophobic surface," Phys. Rev. Lett. 96, no.6, pp. 066 001-1-066 001-4, Feb. 2006.
11. H. Yang and Y. Deng, "Preparation and physical properties of superhy-drophobic papers," J. Colloid Interface Sci. 325, no.2, pp. 588-593, Sep. 2008.
12. J. Genzer and K. Efimenko, "Creating long-lived superhydrophobic polymer surfaces through mechanically assembled monolayers," Science 290, no.5499, pp. 2130-2133, Dec. 2000.
13. Y. Li, X. J. Huang, S. H. Heo, C. C. Li, Y. K. Choi, W. P. Cai, and S. O. Cho, "Superhydrophobic bionic surfaces with hierarchical microsphere/SWCNT composite arrays," Langmuir 23, no.4, pp. 2169-2174, Feb. 2007.
14. H. Y. Kwong, M. H. Wong, Y. W. Wong, and K. H. Wong, "Super- hydrophobicity of polytetrafluoroethylene thin film fabricated by pulsed laser deposition," Appl. Surf. Sci. 253, no.22, pp. 8841-8845, Sep. 2007.
15. L. B. Zhang, H. Chen, J. Q. Sun, and J. C. Shen, "Layer-by-layer deposition of poly(diallyldimethylammonium chloride) and sodium silicate multilayers on silica-sphere-coated substrate-Facile method to prepare a superhydrophobic surface," Chem. Mater. 19, no.4, pp. 948-953, Feb. 2007.
16. Y. Li, W. Z. Jia, Y. Y. Song, and X. H. Xia, "Superhydrophobicity of 3D porous copper films prepared using the hydrogen bubble dynamic template," Chem. Mater. 19, no.23, pp. 5758-5764, Nov. 2007.
17. N. J. Shirtcliffe, G. McHale, M. I. Newton, C. C. Perry, and P. Roach, "Porous materials show superhydrophobic to suphydrophilic switching," Chem. Commun. 25, pp. 3135-3137, 2005.
18. Z. B. Huang, Y. Zhu, J. H. Zhang, and G. F. Yin, "Stable biomimetic superhydrophobicity and magnetization film with Cu-ferrite nanorods," J. Phys. Chem. C 111, no.18, pp. 6821-6825, May 2007.
19. 2 nanotube arrays on copper foil," Appl. Surf. Sci. 255, no.7, pp. 4015-4019, Jan. 2009.
20. G. X. Li, Y. Liu, B. Wang, X. M. Song, E. Li, and H. Yan, "Preparation of transparent BN films with superhydrophobic surface," Appl. Surf. Sci. 254, no.17, pp. 5299-5303, Jun. 2008.
21. E. Puukilainen, T. Rasilainen, M. Suvanto, and T. A. Pakkanen, "Super-hydrophobic polyolefin surfaces: Controlled micro-and nanostructures," Langmuir 23, no.13, pp. 7263-7268, Jun. 2007. (Pubitemid 350296396)
22. X. M. Li, D. Reinhoudt, and M. Crego-Calama, "What do we need for a superhydrophobic surface? A review on the recent progress in the preparation of superhydrophobic surfaces," Chem. Soc. Rev. 36, no.8, pp. 1350-1368, Aug. 2007.
23. Z. Q. Yuan, H. Chen, and J. D. Zhang, "Facile method to prepare lotus-leaf-like super-hydrophobic poly(vinyl chloride) film," Appl. Surf. Sci. 254, no.6, pp. 1593-1598, Jan. 2008.
24. E. Martines, K. Seunarine, H. Morgan, N. Gadegaard, C. D. W. Wilkinson, and M. O. Riehle, "Superhydrophobicity and superhydrophilicity of regular nanopatterns," Nano Lett. 5, no.10, pp. 2097-2103, Oct. 2005.
25. R. Furstner, W. Barthlott, C. Neinhuius, and P. Walzel, "Wetting and self-cleaning properties of artificial superhydrophobic surfaces," Langmuir 21, no.3, pp. 956-961, Feb. 2005.
26. R. Seeman, M. Brinkmann, E. J. Kramer, F. F. Lange, and R. Lipowsky, "Wetting morphologies at microstructured surfaces," Proc. Nat. Acad. Sci. 102, no.6, pp. 1848-1852, Feb. 2005.
27. B. Bhushan, "Biomimetics: Lessons from nature-An overview," Phil. Trans. R. Soc. A 367, no.1893, pp. 1445-1486, 2009.
28. W. Song, D. D. Veiga, C. A. Custodio, and J. F. Mano, "Bioinspired degradable substrates with extreme wettability properties," Adv. Mater. 21, no.18, pp. 1830-1834, May 2009.
29. S. Mornet, S. Vasseur, F. Grasset, and E. Duguet, "Magnetic nanoparticle design for medical diagnosis and therapy," J. Mater. Chem. 14, pp. 2161-2175, 2004.
30. H. Zhang, Y. Lee, K. J. Leck, N. Y. Kim, and J. Y. Ying, "Recyclable hydrophilic-hydrophobic micropatterns on glass for microarray applications," Langmuir 23, no.9, pp. 4728-4731, Apr. 2007.
31. R. S. Voronov and D. V. Papavassiliou, "Review of fluid slip over super-hydrophobic surfaces and its dependence on the contact angle," Ind. Eng. Chem. Res. 47, no.8, pp. 2455-2477, Apr. 2008.
32. M. Ma and R. M. Hill, "Superhydrophobic surface," Current Opinion Colloid Interface Sci. 11, no.4, pp. 193-202, Oct. 2006.
33. G. P. Lopez, H. A. Biebuyck, C. D. Frisbie, and G. M. Whitesides, "Imaging of features on surfaces by condensation figures," Science 260, no.5108, pp. 647-649, Apr. 1993.
34. J. Drelich, J. D. Miller, A. Kumar, and G. M. Whitesides, "Wetting characteristics of liquid drops at heterogeneous surfaces," Colloids Surf. A 93, pp. 1-13, 1994.
35. T. Sun, G. Wang, H. Liu, L. Feng, L. Jiang, and D. Zhu, "Control over the wettability of an aligned carbon nanotube film," J. Amer. Chem. Soc. 125, no.49, pp. 14 996-14 997, Dec. 2003.
36. L. Zhai, M. C. Berg, F. Cebeci, Y. Kim, J. M. Milwid, M. F. Rubner, and R. E. Cohen, "Patterned superhydrophobic surfaces: Toward a synthetic mimic of the Namib Desert beetle," Nano Lett. 6, no.6, pp. 1213-1217, Jun. 2006.
37. L. Yang, S. Bai, D. Zhu, Z. Yang, M. Zhang, Z. Zhang, E. Chen, and W. Cao, "Superhydrophobic patterned film fabricated from DNA assembly and Ag deposition," J. Phys. Chem. C 111, no.1, pp. 431-434, Jan. 2007.
38. G. Piret, Y. Coffinier, C. Roux, O. Melnyk, and R. Boukherroub, "Bio-molecule and nanoparticles transfer on patterned and heterogeneously wetted superhydrophobic silicon nanowire surfaces," Langmuir 24, no.5, pp. 1670-1672, Mar. 2008.
39. K. Tadanaga, J. Morinaga, A. Matsuda, and T. Minami, " Superhydrophobic-superhydrophilic micropatterning on flowerlike alumina coating film by the sol-gel method," Chem. Mater. 12, no.3, pp. 590-592, Mar. 2000.
40. H. Kim, C. R. Kreller, K. A. Tran, V. Sisodiya, S. Angelos, G. Wallraff, S. Swason, and R. D. Miller, "Nanoporous thin films with hydrophilicity-contrasted patterns," Chem. Mater. 16, no.22, pp. 4267-4272, Nov. 2004.
41. H. C. Kim, G. Wallraff, C. R. Kreller, S. Angelos, V. Y. Lee, W. Volksen, and R. D. Miller, "Photopatterned nanoporous media," Nano Lett. 4, no.7, pp. 1169-1174, Jul. 2004.
42. Z. Z. Gu, A. Fujishima, and O. Sato, "Patterning of a colloidal crystal film on a modified hydrophilic and hydrophobic surface," Angew. Chem. 114, no.12, pp. 2171-2174, Jun. 2002.
43. R. P. Garrod, L. G. Harris, W. C. E. Schofield, J. McGettrick, L. J. Ward, D. O. H. Teare, and J. P. S. Badyal, "Mimicking a steno-cara beetle's back for microcondensation using plasmachemical patterned superhydrophobic- superhydrophilic surfaces," Langmuir 23, no.2, pp. 689-693, Jan. 2007.
44. B. Bhushan, Nanotribology and Nanomechanics, 2nd ed. New York: Springer-Verlag, 2008.
45. D. L. Herbertson, C. R. Evans, N. J. Shirtcliffe, G. McHale, and M. I. Newton, "Electrowetting on superhydrophobic SU-8 patterned surfaces," Sens. Actuators A, Phys. 130/131, pp. 189-193, Aug. 2006.
46. G. Blanco-Gomez, A. Glidle, L. M. Flendrig, and J. M. Cooper, "Creation of super-hydrophobic siloxane-modified SU-8 microstuctures," Micro-electron. Eng. 86, no.4-6, pp. 1325-1328, Apr. 2009.
47. H. Cong, J. Zhang, M. Radosz, and Y. Shen, "Carbon nanotube composite membranes of brominated poly(2,6-diphenyl-1,4-phenylene oxide) for gas separation," J. Membr. Sci. 294, no. 1/2, pp. 178-185, May 2007.
48. S. Jiguel, A. Bertsch, H. Hofmann, and P. Renaud, "Conductive SU8 photoresist for microfabrication," Adv. Funct. Mater. 15, no.9, pp. 1511-1516, Sep. 2005.
49. H. Cong and T. Pan, "Photopatternable conductive PDMS as a new MEMS material," in Tech. Dig. Solid State Sens., Actuator Microsyst. Workshop, 2008, p. 228.
50. C. Liu, "Recent developments in polymer MEMS," Adv. Mater. 19, no.22, pp. 3783-3790, Nov. 2007.
51. R. J. Plunkett, "Tetrafluoroethylene polymers," U.S. Patent 2 230 654, Feb. 4, 1941.
52. Q. Zhao, Y. Liu, H. Muller-Steinhagen, and G. Liu, "Graded Ni-P-PTFE coatings and their potential applications," Surf. Coat. Technol. 155, no. 2/3, pp. 279-284, Jun. 2002.
53. J. Zhang, J. Li, and Y. Han, "Superhydrophobic PTFE surfaces by extension," Macromol. Rapid Commun. 25, no.11, pp. 1105-1108, Jun. 2004.
54. SU-8 2000 Permanent Epoxy Negative Photoresist Processing Guidelines. [Online]. Available www.microchem.com
55. K. K. S. Lau, J. Bico, K. B. K. Teo, M. Chhowalla, G. A. J. Amaratunga, W. I. Milne, G. H. McKinley, and K. K. Gleason, "Superhydrophobic carbon nanotube forests," Nano Lett. 3, no.12, pp. 1701-1705, Dec. 2003.
56. E. Burkarter, C. K. Saul, F. Thomazi, N. C. Cruz, L. S. Roman, and W. H. Schreiner, "Superhydrophobic electrosprayed PTFE," Surf. Coat. Technol. 202, no.1, pp. 194-198, Nov. 2007.
57. T. Y. Han, J. F. Shr, C. F. Wu, and C. T. Hsieh, "A modified Wenzel model for hydrophobic behavior of nanostructured surfaces," Thin Solid Films 515, no.11, pp. 4666-4669, Apr. 2007.
58. K. Othmer, Encyclopedia of Chemical Technology, 3rd ed. Hoboken, NJ: Wiley, 1980.
59. H. Bladel, B. Felix, K. Hintzer, G. Lohr, and W. D. Mitterberger, "Aqueous dispersion of fluoropolymers, its preparation and use for coating," U.S. Patent 5 576 381, Nov. 19, 1996.
60. T. Kawamura, S. Ichiba, and T. Sota, "Method for emulsion polymerization of tetrafluoroethylene and method for prevention of irregular polymerization thereof," U.S. Patent 5814 713, Sep. 29, 1998.
61. F. C. McCoy and J. P. Fay, "Manufacturing procedures for making high polytetrafluoroethylene content dispersions in oil for lubricant use and the compositions so produced," U.S. Patent 5 744 539, Apr. 28, 1998.
62. C. U. Kim, J. M. Lee, and S. K. Ihm, "Emulsion polymerization of tetrafluoroethylene: Effects of reaction conditions on the polymerization rate and polymer molecular weight," J. Appl. Polym. Sci. 73, no.5, pp. 777-793, Aug. 1999.
63. J. N. Israelachvili, Intermolecular and Surface Forces. New York: Academic, 1992.
64. A. B. D. Cassie and S. Baxter, "Wettability of porous surfaces," Trans. Faraday Soc. 40, pp. 546-551, 1944.
65. Z. J. Han, B. K. Tay, M. Shakerzadeh, and K. Ostrikov, "Superhydropho-bic amorphous carbon/carbon nanotube nanocomposites," Appl. Phys. Lett. 94, no.22, p. 223 106, 2009.
66. A. Ahuja, J. A. Taylor, V. Lifton, A. A. Sidorenko, T. R. Salamon, E. J. Lobaton, P. Kolodner, and T. N. Krupenkin, "Nanonails: A simple geometrical approach to electrically tunable superlyophobic surfaces," Langmuir 24, no.1, pp. 9-14, Jan. 2008.