A rotary microactuator supported on encapsulated microball bearings using an electro-pneumatic thrust balance

Journal of Micromechanics and Microengineering

Volumn 19, Issue 9, 2009, Pages

  McCarthy, Matthew ^a   Waits, C Mike ^b   Beyaz, Mustafa I ^c   Ghodssi, Reza ^c  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

^c UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AT-SPEED; BEARING FRICTION; ELECTROPNEUMATIC; ELECTROSTATIC MICROACTUATORS; MICRO BALL BEARINGS; NORMAL LOADS;

BALL BEARINGS; ELECTROSTATIC ACTUATORS; MICROACTUATORS; PNEUMATICS;

THRUST BEARINGS;

EID: 70350645339     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/9/094007     Document Type: Article

References (17)

1. Huang C et al 2002 J. Microelectromech. Syst. 11 222-35
2. Ko J S et al 2002 Appl. Phys. Lett. 81 547-9
3. Cusin P, Sawai T and Konishi S 2000 J. Micromech. Microeng. 10 516-21
4. Lim T S et al 2004 IEEE J. Sel. Top. Quantum Electron. 10 558-62
5. Heo S and Kim Y K 2007 J. Micromech. Microeng. 17 2241-7
6. Tai Y, Fan L and Muller R 1989 Proc. IEEE Int. Conf. MEMS pp 666-9
7. Livermore C et al 2004 J. Microelectromech. Syst. 13 465-71
8. Frehette L et al 2005 J. Microelectromech. Syst. 14 141-52
9. Modafe A et al 2006 J. Micromech. Microeng. 16 S182-90
10. Ghalichechian N, Modafe A, Lang J and Ghodssi R 2007 Sensors Actuators A 136 416-503
11. Ghalichechian N, Modafe A, Beyaz M I and Ghodssi R 2008 J. Microelectromech. Syst. 17 632-42
12. Waits C M, Geil B and Ghodssi R 2007 J. Micromech. Microeng. 17 S224-9
13. Waits C M et al 2007 14th Int. Conf. on Solid-State Sensors, and Microsystems pp 1131-4
14. McCarthy M, Waits C M and Ghodssi R 2007 7th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Application pp 241-4
15. McCarthy M, Waits C M and Ghodssi R 2008 Solid-State Sensor, Actuator, and Microsystems Workshop pp 170-3
16. McCarthy M, Waits C M and Ghodssi R 2009 J. Microelectromech. Syst. 18 263-73
17. Wong C et al 2004 J. Microelectromech. Syst. 13 158-64