Design and characterization of MEMS micromotor supported on low friction liquid bearing

Sensors and Actuators, A: Physical

Volumn 177, Issue , 2012, Pages 1-9

  Chan, Mei Lin ^a   Yoxall, Brian ^a   Park, Hyunkyu ^a   Kang, Zhaoyi ^b   Izyumin, Igor ^b   Chou, Jeffrey ^b   Megens, Mischa M ^b   Wu, Ming C ^b   Boser, Bernhard E ^b   Horsley, David A ^a  

^a University of California Davis   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Hydrophobic; Liquid bearing; Magnetic drive; Micromachining; Micromotor; Torque

Indexed keywords

DISK-TYPE; FLUID THICKNESS; HYDROPHOBIC; HYDROPHOBIC LAYERS; LIQUID BEARING; LIQUID BEARINGS; LOW FRICTION; MAGNETIC ACTUATION; MAGNETIC DRIVE; MICRO DEVICES; MICRO-MECHANICAL; MICROMOTOR; ROTATION RATE; SURFACE PATTERNING; VISCOUS FRICTION;

FRICTION; HYDROPHOBICITY; MICROMACHINING; MICROMOTORS; TORQUE;

BALL BEARINGS;

EID: 84858081424     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.08.003     Document Type: Article

References (14)

1. M.L. Chan, B. Yoxall, H. Park, Z. Kang, I. Izyumin, J. Chou, M.M. Megens, M.C. Wu, B.E. Boser, and D.A. Horsley Low friction liquid bearing mems micromotor IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) 2011 1237 1240
2. L.S. Fan, Y.C. Tai, and R.S. Muller IC-processed electrostatic micromotors Sensors and Actuators November (20) 1989 41 47
3. M. Mehregany, S.F. Bart, L.S. Tavrow, J.H. Lang, S.D. Senturia, and M.F. Schlecht A study of three microfabricated variable capacitance motors Sensors and Actuators A: Physical February (21) 1990 173 179 (Pubitemid 20699303)
4. V. Kaajakari, and A. Lal Micromachined ultrasonic motor based on parametric polycrystalline silicon plate excitation Sensors and Actuators A: Physical June (137) 2007 120 128 (Pubitemid 46818930)
5. C.H. Ahn, Y.J. Kim, and M.G. Allen A planar variable reluctance magnetic micromotor with fully integrated stator and coils Journal of Microelectromechanical Systems December (2) 1993 165 173
6. N. Ghalichechian, A. Modafe, M.I. Beyaz, and R. Ghodssi Design, fabrication, and characterization of a rotary micromotor supported on microball bearings Journal of Microelectromechanical Systems June (17) 2008 632 642
7. L.G. Frechette, S.A. Jacobson, K.S. Breuer, F.F. Ehrich, R. Ghodssi, R. Khanna, C.W. Wong, X. Zhang, M.A. Schmidt, and A.H. Epstein High-speed microfabricated silicon turbomachinery and fluid film bearings Journal of Microelectromechanical Systems February (14) 2005 141 152 (Pubitemid 40274563)
8. S. Kumar, D. Cho, and W.N. Carr Experimental study of electric suspension for microbearings Journal of Microelectromechanical Systems March (1) 1992 23 30
9. X.S. Wu, W.Y. Chen, X.L. Zhao, and W.P. Zhang Micromotor with electromagnetically levitated rotor using separated coils Electronics Letters August (40) 2004 996 997
10. A. Takei, N. Binh-Khiem, E. Iwase, K. Matsumoto, and I. Shimoyama Liquid motor driven by electrowetting Presented at the 2008 21st IEEE International Conference on Micro Electro Mechanical Systems - MEMS'08 Tucson, AZ 2008
11. A. Kajiwara, K. Suzuki, H. Miura, and H. Takanobu Study on micromotor using surface tension of liquid droplets Research Reports of Kogakuin University 2006 25 30 (October)
12. B. Wagner, M. Kreutzer, and W. Benecke Permanent magnet micromotors on silicon substrates Journal of Microelectromechanical Systems 2 1993 23 29
13. M.M. Khonsari, and E.R. Booser Journal Bearings 2008 John Wiley & Sons, Ltd.
14. E. Piekos, Numerical Simulation of Gas-lubricated Journal Bearings for Microfabricated Machines, Ph.D. Doctoral Thesis, MIT, Cambridge, MA, USA, 2000.