-
1
-
-
0024173326
-
IC-processed electrostatic micromotors
-
San Francisco, CA
-
L.-S. Fan, Y.-C. Tai, and R. S. Muller, "IC-processed electrostatic micromotors," in IEDM Tech. Dig., San Francisco, CA, 1988, pp. 666-669.
-
(1988)
IEDM Tech. Dig
, pp. 666-669
-
-
Fan, L.-S.1
Tai, Y.-C.2
Muller, R.S.3
-
2
-
-
0024865148
-
IC processed micro-motors: Design, technology, and testing
-
Salt Lake City, UT
-
Y. C. Tai, L. S. Fan, and R. S. Muller, "IC processed micro-motors: Design, technology, and testing," in Proc. IEEE Microelectromech. Syst., Salt Lake City, UT, 1989, pp. 1-6.
-
(1989)
Proc. IEEE Microelectromech. Syst
, pp. 1-6
-
-
Tai, Y.C.1
Fan, L.S.2
Muller, R.S.3
-
3
-
-
0001489745
-
Principles in design and microfabrication of variable-capacitance side-drive motors
-
Jul
-
M. Mehregany, S. F. Bart, L. S. Tavrow, J. H. Lang, and S. D. Senturia, "Principles in design and microfabrication of variable-capacitance side-drive motors," J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. 8, no. 4, pp. 3614-3624, Jul. 1990.
-
(1990)
J. Vac. Sci. Technol. A, Vac. Surf. Films
, vol.8
, Issue.4
, pp. 3614-3624
-
-
Mehregany, M.1
Bart, S.F.2
Tavrow, L.S.3
Lang, J.H.4
Senturia, S.D.5
-
4
-
-
0025565334
-
Friction and wear in microfabricated harmonic side-drive motors
-
Hilton Head Island, SC
-
M. Mehregany, S. D. Senturia, and J. H. Lang, "Friction and wear in microfabricated harmonic side-drive motors," in Proc. Solid-State Sens., Actuators Microsyst. Workshop, Hilton Head Island, SC, 1990, pp. 17-22.
-
(1990)
Proc. Solid-State Sens., Actuators Microsyst. Workshop
, pp. 17-22
-
-
Mehregany, M.1
Senturia, S.D.2
Lang, J.H.3
-
5
-
-
0026868350
-
Measurement of wear in polysilicon micromotors
-
May
-
M. Mehregany, S. Senturia, and J. Lang, "Measurement of wear in polysilicon micromotors," IEEE Trans. Electron Devices, vol. 39, no. 5, pp. 1136-1143, May 1992.
-
(1992)
IEEE Trans. Electron Devices
, vol.39
, Issue.5
, pp. 1136-1143
-
-
Mehregany, M.1
Senturia, S.2
Lang, J.3
-
6
-
-
0027694424
-
A comparative study of bearing designs and operational environments for harmonic side-drive micromotors
-
Nov
-
V. R. Dhuler, M. Mehregany, and S. M. Phillips, "A comparative study of bearing designs and operational environments for harmonic side-drive micromotors," IEEE Trans. Electron Devices, vol. 40, no. 11, pp. 1985-1989, Nov. 1993.
-
(1993)
IEEE Trans. Electron Devices
, vol.40
, Issue.11
, pp. 1985-1989
-
-
Dhuler, V.R.1
Mehregany, M.2
Phillips, S.M.3
-
7
-
-
0031336439
-
Frictional study of micromotor bearings
-
Dec
-
U. Beerschwinger, R. L. Reuben, and S. J. Yang, "Frictional study of micromotor bearings," Sens. Actuators A, Phys., vol. 63, no. 3, pp. 229-241, Dec. 1997.
-
(1997)
Sens. Actuators A, Phys
, vol.63
, Issue.3
, pp. 229-241
-
-
Beerschwinger, U.1
Reuben, R.L.2
Yang, S.J.3
-
8
-
-
0025452546
-
A proposal for electrically levitating micromotors
-
Jul
-
S. Kumar, D. Cho, and W. Carr, "A proposal for electrically levitating micromotors," Sens. Actuators A, Phys., vol. 24, no. 2, pp. 141-149, Jul. 1990.
-
(1990)
Sens. Actuators A, Phys
, vol.24
, Issue.2
, pp. 141-149
-
-
Kumar, S.1
Cho, D.2
Carr, W.3
-
9
-
-
0035273210
-
Magnetically levitated micro PM motors by two types of active magnetic bearings
-
Mar
-
K. Komori and T. Yamane, "Magnetically levitated micro PM motors by two types of active magnetic bearings," IEEE/ASME Trans.Mechatronics, vol. 6, no. 1, pp. 43-49, Mar. 2001.
-
(2001)
IEEE/ASME Trans.Mechatronics
, vol.6
, Issue.1
, pp. 43-49
-
-
Komori, K.1
Yamane, T.2
-
10
-
-
80053611902
-
Microheat engine, gas turbine, and rocket engines - The MIT microengine project
-
presented at the, Snowmass Village, CO, Jun
-
A. H. Epstein, S. D. Senturia, O. Al-Midani, G. Anathasuresh, A. Ayon, K. Breuer, K.-S. Chen, F. F. Ehrich, E. Esteve, and L. Frechette, "Microheat engine, gas turbine, and rocket engines - The MIT microengine project," presented at the 28th AIAA Fluid Dynamics Conf., Snowmass Village, CO, Jun. 1997.
-
(1997)
28th AIAA Fluid Dynamics Conf
-
-
Epstein, A.H.1
Senturia, S.D.2
Al-Midani, O.3
Anathasuresh, G.4
Ayon, A.5
Breuer, K.6
Chen, K.-S.7
Ehrich, F.F.8
Esteve, E.9
Frechette, L.10
-
11
-
-
0345951483
-
Development of high-speed gas bearings for high-power density microdevices
-
Jan
-
F. F. Ehrich and S. A. Jacobson, "Development of high-speed gas bearings for high-power density microdevices," ASME J. Eng. Gas Turbines Power, vol. 125, no. 1, pp. 141-148, Jan. 2003.
-
(2003)
ASME J. Eng. Gas Turbines Power
, vol.125
, Issue.1
, pp. 141-148
-
-
Ehrich, F.F.1
Jacobson, S.A.2
-
12
-
-
3142753424
-
A high-power MEMS electric induction motor
-
Jun
-
C. Livermore, A. Forte, T. Lyszczara, S. D. Umans, and J. H. Lang, "A high-power MEMS electric induction motor," J. Microelectromech. Syst., vol. 13, no. 3, pp. 465-471, Jun. 2004.
-
(2004)
J. Microelectromech. Syst
, vol.13
, Issue.3
, pp. 465-471
-
-
Livermore, C.1
Forte, A.2
Lyszczara, T.3
Umans, S.D.4
Lang, J.H.5
-
13
-
-
0035008069
-
An electrostatic induction micromotor supported on gas-lubricated bearings
-
Interlaken, Switzerland, Jan. 21-25
-
L. G. Fréchette, S. F. Nagle, R. Ghodssi, S. D. Umans, M. A. Schmidt, and J. H. Lang, "An electrostatic induction micromotor supported on gas-lubricated bearings," in Proc. IEEE Microelectromech. Syst., Interlaken, Switzerland, Jan. 21-25, 2001, pp. 290-293.
-
(2001)
Proc. IEEE Microelectromech. Syst
, pp. 290-293
-
-
Fréchette, L.G.1
Nagle, S.F.2
Ghodssi, R.3
Umans, S.D.4
Schmidt, M.A.5
Lang, J.H.6
-
14
-
-
14044271466
-
High-speed microfabricated silicon turbomachinery and fluid film bearings
-
Feb
-
L. G. Fréchette, S. A. Jacobson, K. S. Breuer, F. F. Ehrlich, R. Ghodssi, R. Khanna, C. W. Wong, X. Zhang, M. A. Schmidt, and A. Epstein, "High-speed microfabricated silicon turbomachinery and fluid film bearings," J. Microelectromech. Syst., vol. 14, no. 1, pp. 141-152, Feb. 2005.
-
(2005)
J. Microelectromech. Syst
, vol.14
, Issue.1
, pp. 141-152
-
-
Fréchette, L.G.1
Jacobson, S.A.2
Breuer, K.S.3
Ehrlich, F.F.4
Ghodssi, R.5
Khanna, R.6
Wong, C.W.7
Zhang, X.8
Schmidt, M.A.9
Epstein, A.10
-
15
-
-
2942629890
-
Characterization of dynamic friction in MEMS-based microball bearings
-
Jun
-
T.-W. Lin, A. Modafe, B. Shapiro, and R. Ghodssi, "Characterization of dynamic friction in MEMS-based microball bearings," IEEE Trans. Instrum. Meas., vol. 53, no. 3, pp. 839-846, Jun. 2004.
-
(2004)
IEEE Trans. Instrum. Meas
, vol.53
, Issue.3
, pp. 839-846
-
-
Lin, T.-W.1
Modafe, A.2
Shapiro, B.3
Ghodssi, R.4
-
16
-
-
33845938537
-
Measurement and modeling of dynamic rolling friction in linear microball bearings
-
Dec
-
X. Tan, A. Modafe, and R. Ghodssi, "Measurement and modeling of dynamic rolling friction in linear microball bearings," Trans. ASME, J. Dyn. Syst. Meas. Control, vol. 128, no. 4, pp. 891-898, Dec. 2006.
-
(2006)
Trans. ASME, J. Dyn. Syst. Meas. Control
, vol.128
, Issue.4
, pp. 891-898
-
-
Tan, X.1
Modafe, A.2
Ghodssi, R.3
-
17
-
-
34247593738
-
Dynamic characterization of a linear electrostatic micromotor supported on microball bearings
-
May
-
N. Ghalichechian, A. Modafe, J. H. Lang, and R. Ghodssi, "Dynamic characterization of a linear electrostatic micromotor supported on microball bearings," Sens. Actuators A, Phys., vol. 136, no. 2, pp. 416-503, May 2007.
-
(2007)
Sens. Actuators A, Phys
, vol.136
, Issue.2
, pp. 416-503
-
-
Ghalichechian, N.1
Modafe, A.2
Lang, J.H.3
Ghodssi, R.4
-
18
-
-
45449099948
-
Design, fabrication, and characterization of a rotary micromotor supported on microball bearings
-
Jun
-
N. Ghalichechian, A. Modafe, M. Beyaz, and R. Ghodssi, "Design, fabrication, and characterization of a rotary micromotor supported on microball bearings," J. Microelectromech. Syst., vol. 17, no. 3, pp. 632-642, Jun. 2008.
-
(2008)
J. Microelectromech. Syst
, vol.17
, Issue.3
, pp. 632-642
-
-
Ghalichechian, N.1
Modafe, A.2
Beyaz, M.3
Ghodssi, R.4
-
19
-
-
45449104354
-
Design, fabrication, and characterization of rotary variable-capacitance micromotor supported on microball bearings,
-
Ph.D. dissertation, Univ. Maryland, College Park, MD
-
N. Ghalichechian, "Design, fabrication, and characterization of rotary variable-capacitance micromotor supported on microball bearings," Ph.D. dissertation, Univ. Maryland, College Park, MD, 2007.
-
(2007)
-
-
Ghalichechian, N.1
-
20
-
-
50149087338
-
Measurement and modeling of friction in linear and rotary micromotors supported on microball bearings
-
Tucson, AZ, Jan. 13-17
-
N. Ghalichechian, M. McCarthy, M. Beyaz, and R. Ghodssi, "Measurement and modeling of friction in linear and rotary micromotors supported on microball bearings," in Proc. IEEE Microelectromech. Syst., Tucson, AZ, Jan. 13-17, 2008, pp. 507-510.
-
(2008)
Proc. IEEE Microelectromech. Syst
, pp. 507-510
-
-
Ghalichechian, N.1
McCarthy, M.2
Beyaz, M.3
Ghodssi, R.4
-
21
-
-
50049121051
-
MEMS rotary actuator using an integrated ball bearing and air turbine
-
Lyon, France, Jun. 10-14
-
C. M. Waits, N. Jankowski, B. Geil, and R. Ghodssi, "MEMS rotary actuator using an integrated ball bearing and air turbine," in Proc. Int. Conf. Solid-State Sens. Microsyst., Lyon, France, Jun. 10-14, 2007, pp. 1131-1134.
-
(2007)
Proc. Int. Conf. Solid-State Sens. Microsyst
, pp. 1131-1134
-
-
Waits, C.M.1
Jankowski, N.2
Geil, B.3
Ghodssi, R.4
-
22
-
-
50049095023
-
Encapsulated ball bearings for rotary micromachines
-
Sep
-
C. M. Waits, B. Geil, and R. Ghodssi, "Encapsulated ball bearings for rotary micromachines," J. Micromech. Microeng., vol. 17, no. 9, pp. S224-S229, Sep. 2007.
-
(2007)
J. Micromech. Microeng
, vol.17
, Issue.9
-
-
Waits, C.M.1
Geil, B.2
Ghodssi, R.3
-
23
-
-
67349164727
-
Development of a hybrid gas/ ball bearing support mechanism for microturbomachinery
-
Freiburg, Germany, Nov. 28-29
-
M. McCarthy, C. M. Waits, and R. Ghodssi, "Development of a hybrid gas/ ball bearing support mechanism for microturbomachinery," in Proc. Int.Workshop Micro Nanotechnol. Power Gen. Energy Convers., Freiburg, Germany, Nov. 28-29, 2007, pp. 241-244.
-
(2007)
Proc. Int.Workshop Micro Nanotechnol. Power Gen. Energy Convers
, pp. 241-244
-
-
McCarthy, M.1
Waits, C.M.2
Ghodssi, R.3
-
27
-
-
33645967546
-
Design principles and aerodynamics of low Reynolds multi-stage microturbomachinery
-
Anaheim, CA, Nov. 13-19
-
C. Lee, S. Arslan, and L. G. Fréchette, "Design principles and aerodynamics of low Reynolds multi-stage microturbomachinery," in Proc. ASME Int. Mech. Eng. Congr. Expo., Anaheim, CA, Nov. 13-19, 2004.
-
(2004)
Proc. ASME Int. Mech. Eng. Congr. Expo
-
-
Lee, C.1
Arslan, S.2
Fréchette, L.G.3
-
28
-
-
55149115283
-
Development of a microfabricated turbopump for a rankine vapor power cycle,
-
Ph.D. dissertation, Columbia Univ, New York, NY
-
C. Lee, "Development of a microfabricated turbopump for a rankine vapor power cycle," Ph.D. dissertation, Columbia Univ., New York, NY, 2006.
-
(2006)
-
-
Lee, C.1
|