Nanoscale scratching of platinum thin films using atomic force microscopy with DLC tips

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 30, Issue 2, 2012, Pages

  Jiang, Xiaohong ^a   Wu, Guoyun ^a   Du, Zuliang ^a   Ma, Keng Jeng ^b   Shirakashi, Jun Ichi ^c   Tseng, Ampere A ^d,e  

^a HENAN UNIVERSITY   (China)

^b CHUNG HUA UNIVERSITY   (Taiwan)

^c TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^d BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

^e ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON FILMS; NANOTECHNOLOGY; PLATINUM; WEAR OF MATERIALS;

APPLIED FORCES; CORRELATION PARAMETERS; CYCLE NUMBER; DIAMOND LIKE CARBON; MICRO-SCALES; NANO SCALE; NANOSCALE STRUCTURE; PLATINUM THIN FILM; PT FILMS; SCRATCH SPEED; TIP FORCES; TIP WEAR; WEAR BEHAVIORS; WEAR RATES;

DIAMOND LIKE CARBON FILMS;

EID: 84861636283     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3694242     Document Type: Article

References (27)

1. A. A. Tseng, A. Notargiacomo, and T. P. Chen, J. Vac. Sci. Technol. B 23, 877 (2005). 10.1116/1.1926293
2. A. A. Tseng, Small 7, 3409 (2011). 10.1002/smll.201100486
3. A. A. Tseng, Nano Today 6, 493 (2011). 10.1016/j.nantod.2011.08.003
4. L. Santinacci, Y. Zhang, and P. Schmuki, Surf. Sci. 597, 11 (2005). 10.1016/j.susc.2005.05.069
5. T. Ogino, S. Nishimura, and J. Shirakashi, Jpn. J. Appl. Phys. 47, 712 (2008). 10.1143/JJAP.47.712
6. R. Prioli, M. Chhowalla, and F. L. Freire, Diamond Relat. Mater. 12, 2195 (2003). 10.1016/j.diamond.2003.08.023
7. S. Tsuchitani, R. Kaneko, and S. Hirono, Tribol. Int. 40, 306 (2007). 10.1016/j.triboint.2005.09.018
8. J. Liu, J. Zhao, Z. Liu, and M. Chen, Tribology 28, 6 (2008).
9. A. W. Knoll, D. Pires, O. Coulembier, P. Dubois, J. L. Hedrick, J. Frommer, and U. Duerig, Adv. Mater. 22, 3361 (2010). 10.1002/adma.200904386
10. T.-H. Fang, C. -I Weng, and J.-G. Chang, Nanotechnology 11, 181 (2000). 10.1088/0957-4484/11/3/308
11. H. D. F. Filho, M. H. P. Mauricio, C. R. Ponciano, and R. Prioli, Mater. Sci. Eng. B 112, 194 (2004). 10.1016/j.mseb.2004.05.031
12. A. A. Tseng, J. Shirakashi, S. Nishimura, K. Miyashita, and A. Notargiacomo, J. Appl. Phys. 106, 044314 (2009). 10.1063/1.3197313
13. A. A. Tseng, Appl. Surf. Sci. 256, 4246 (2010). 10.1016/j.apsusc.2010.02. 010
14. N. Kawasegi, N. Takano, D. Oka, N. Morita, S. Yamada, K. Kanda, S. Takano, T. Obata, and K. Ashida, ASME J. Manufact. Sci. Eng. 128, 723 (2006). 10.1115/1.2163364
15. N. Kawasegi, N. Morita, S. Yamada, N. Takano, T. Oyama, K. Ashida, and H. Ofune, Int. J. Mach. Machin. Mater. 2, 3 (2007).
16. S. Hyun, O. Kraft, and R. P. Vinci, Acta Mater. 52, 4199 (2004). 10.1016/j.actamat.2004.05.034
17. N.-H. Kim, D.-M. Na, P.-J. Ko, J.-S. Park, and W.-S. Lee, Diffus. Defect Data, Pt. B 124-126, 267 (2007).
18. M. P. Thompson, R. You, S.-C. Chang, G. W. Auner, and J. V. Mantese, Sens. Actuators A 101, 358 (2002). 10.1016/S0924-4247(02)00267-4
19. C. Quiones, W. Vallejo, and F. Mesa, Appl. Surf. Sci. 256, 7545 (2010).
20. J. F. Archard, J. Appl. Phys 24, 981 (1953). 10.1063/1.1721448
21. H. Bhaskaran, Nat. Nanotechnol. 5, 181 (2010). 10.1038/nnano.2010.3
22. B. Bhushan, Nanotribology and Nanomechanics of MEMS Devices., in 1996 IEEE Micro Electro Mechanical Systems Workshop (IEEE, Piscataway, NJ USA, 1996), 91-98
23. A. A. Tseng, S. Jou, J. C. Huang, J. Shirakashi, and T. P. Chen, J. Vac. Sci. Technol. B 28, 202 (2010). 10.1116/1.3292944
24. A. A. Tseng, C.-F. J. Kuo, S. Jou, S. Nishimura, and J. Shirakashi, Appl. Surf. Sci. 257, 9243 (2011). 10.1016/j.apsusc.2011.04.065
25. A.A. Tseng, J. Vac. Sci. Technol. B 29, 040801 (2011). 10.1116/1.3609921
26. F. Zhang, H. Zhang, Y. Yan, and J. Wang, Key Eng. Mater. 359-360, 269 (2008). 10.4028/www.scientific.net/KEM.359-360.269
27. A.A. Tseng, in Tip-Based Nanofabrication: Fundamentals and Applications, edited, A. A. Tseng, (Springer, New York, 2011), Chap., pp. 1-64.