Nanotribology and nanomechanics of MEMS devices

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 91-98

  Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANISOTROPY; ATOMIC FORCE MICROSCOPY; CHEMICAL BONDS; LUBRICATION; NANOTECHNOLOGY; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SURFACE MEASUREMENT; SURFACE ROUGHNESS; TRIBOLOGY; WEAR OF MATERIALS;

FRICTION FORCE MICROSCOPY; MICROSCALE FRICTION; NANOMECHANICS; NANOTRIBOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0029734871     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (43)