SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B

Volumn 29, Issue 4, 2011, Pages

Three-dimensional patterning of nanostructures using atomic force microscopes

(1) Tseng, Ampere A a

a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; SOFTWARE RELIABILITY;

BASIC BUILDING BLOCK; FABRICATION TECHNOLOGIES; GEOMETRIC PRECISION; LAYER MANUFACTURING; PARALLEL PROCESSING; PATTERNING TECHNIQUES; THREEDIMENSIONAL (3-D); TWO-DIMENSIONAL NANOSTRUCTURES;

NANOSTRUCTURES;

EID: 80051861822 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3609921 Document Type: Article

Times cited : (24)

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