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Volumn 47, Issue 1 PART 2, 2008, Pages 712-714

Scratch nanolithography on Si surface using scanning probe microscopy: Influence of scanning parameters on groove size

Author keywords

Diamond tip; Dot array; Groove; Line and space; Nanolithography; Nanostructures; Scanning probe microscope; Scratch; Silicon

Indexed keywords

DIAMONDS; MICROSCOPIC EXAMINATION; NANOLITHOGRAPHY; NANOSTRUCTURES; SELF PHASE MODULATION; SILICON; SPACE PROBES; SPEED; STATISTICAL PROCESS CONTROL;

DIAMOND TIP; DOT ARRAY; GROOVE; LINE AND SPACE; SCANNING PROBE MICROSCOPE; SCRATCH;

SCANNING;

EID: 54249099617 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.47.712 Document Type: Article

Times cited : (41)

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