Electrical and thermal properties of platinum thin films prepared by DC magnetron sputtering for micro-heater of microsensor applications after CMP process

Solid State Phenomena

Volumn 124-126, Issue PART 1, 2007, Pages 267-270

  Kim, Nam Hoon ^a   Na, Dong Myong ^a   Ko, Pil Ju ^a   Park, Jin Seong ^a   Lee, Woo Sun ^a  

^a Chosun University   (South Korea)

Author keywords

Chemical mechanical planarization (CMP); Micro heater; Microsensor; Platinum (Pt)

Indexed keywords

MAGNETRON SPUTTERING; MICROSENSORS; PLATINUM; POLISHING; SURFACE MORPHOLOGY;

CHEMICAL MECHANICAL PLANARIZATION (CMP); MICRO-HEATERS;

THIN FILMS;

EID: 34548814376     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-31-0.267     Document Type: Conference Paper

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