Analysis of a microelectromechanical system testing stage for tensile loading of nanostructures

Review of Scientific Instruments

Volumn 77, Issue 5, 2006, Pages

  Lu, Shaoning ^a   Guo, Zaoyang ^a   Ding, Weiqiang ^a   Ruoff, Rodney S ^a  

^a Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; ANODIZED ALUMINA; MICROELECTROMECHANICAL-SYSTEM (MEMS); NANOPORE ARRAYS;

AMORPHOUS MATERIALS; ANODIC OXIDATION; CARBON NANOTUBES; ELASTICITY; NANOSTRUCTURED MATERIALS; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; TENSILE TESTING;

MICROELECTROMECHANICAL DEVICES;

EID: 33744797654     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2198789     Document Type: Article

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