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Volumn 155, Issue 1, 2009, Pages 1-7

Microsystem for nanofiber electromechanical measurements

Author keywords

Calibration; Electromechanical testing; Nanofiber; Straining stage; Uniaxial

Indexed keywords

A-CARBON; ELECTRICAL IMPEDANCE; ELECTRICAL MEASUREMENT; ELECTRICAL SEPARATION; ELECTROMECHANICAL MEASUREMENTS; ELECTROMECHANICAL TESTING; IN-SITU; INPUT POWER; MECHANICAL LOADING; MICRO-SCALES; RESISTANCE MEASUREMENT; RESISTIVE CONTACTS; STRAINING STAGE; THERMAL ACTUATOR; TWO-POINT; UNIAXIAL TESTING;

EID: 71749090687     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.11.001     Document Type: Article
Times cited : (30)

References (23)
  • 1
    • 33745822022 scopus 로고    scopus 로고
    • Process integration of carbon nanotubes into microelectro-mechanical systems
    • Jungen A., Stampfer C., Hoetzel J., Bright V.M., and Hierold C. Process integration of carbon nanotubes into microelectro-mechanical systems. Sensors Actuat. A 130 (2006) 588
    • (2006) Sensors Actuat. A , vol.130 , pp. 588
    • Jungen, A.1    Stampfer, C.2    Hoetzel, J.3    Bright, V.M.4    Hierold, C.5
  • 2
    • 33845243057 scopus 로고    scopus 로고
    • Fabrication of discrete nanoscaled force sensors based on single-walled carbon nanotubes
    • Stampfer C., Jungen A., and Hierold C. Fabrication of discrete nanoscaled force sensors based on single-walled carbon nanotubes. IEEE Sensors J. 6 (2006) 613
    • (2006) IEEE Sensors J. , vol.6 , pp. 613
    • Stampfer, C.1    Jungen, A.2    Hierold, C.3
  • 3
    • 0034723247 scopus 로고    scopus 로고
    • Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load
    • Yu M.F., Lourie O., Dyer M.J., Moloni K., Kelly T.F., and Ruoff R.S. Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load. Science 287 (2000) 637
    • (2000) Science , vol.287 , pp. 637
    • Yu, M.F.1    Lourie, O.2    Dyer, M.J.3    Moloni, K.4    Kelly, T.F.5    Ruoff, R.S.6
  • 4
    • 4244187838 scopus 로고    scopus 로고
    • Tensile loading of ropes of single wall carbon nanotubes and their mechanical properties
    • Yu M.-F., Files B.S., Arepalli S., and Ruoff R.S. Tensile loading of ropes of single wall carbon nanotubes and their mechanical properties. Phys. Rev. Lett. 84 (2000) 5552
    • (2000) Phys. Rev. Lett. , vol.84 , pp. 5552
    • Yu, M.-F.1    Files, B.S.2    Arepalli, S.3    Ruoff, R.S.4
  • 5
    • 3042735467 scopus 로고    scopus 로고
    • Realization of nanoscale resolution with a micromachined thermally actuated testing stage
    • Lu S., Dikin D.A., Zhang S., Fisher F.T., Lee J., and Ruoff R.S. Realization of nanoscale resolution with a micromachined thermally actuated testing stage. Rev. Sci. Inst. 75 (2004) 2154
    • (2004) Rev. Sci. Inst. , vol.75 , pp. 2154
    • Lu, S.1    Dikin, D.A.2    Zhang, S.3    Fisher, F.T.4    Lee, J.5    Ruoff, R.S.6
  • 6
    • 33744797654 scopus 로고    scopus 로고
    • Analysis of a microelectromechanical system testing stage for tensile loading of nanostructures
    • Lu S., Guo Z., Ding W., and Ruoff R.S. Analysis of a microelectromechanical system testing stage for tensile loading of nanostructures. Rev. Sci. Inst. 77 (2006) 056103
    • (2006) Rev. Sci. Inst. , vol.77 , pp. 056103
    • Lu, S.1    Guo, Z.2    Ding, W.3    Ruoff, R.S.4
  • 7
    • 34147101804 scopus 로고    scopus 로고
    • Mechanical characteristics of FIB deposited carbon nanowires using an electrostatic actuated nanotensile testing device
    • Kiuchi M., Matsui S., and Isono Y. Mechanical characteristics of FIB deposited carbon nanowires using an electrostatic actuated nanotensile testing device. J. MEMS 16 (2007) 191
    • (2007) J. MEMS , vol.16 , pp. 191
    • Kiuchi, M.1    Matsui, S.2    Isono, Y.3
  • 8
    • 31344471247 scopus 로고    scopus 로고
    • A thermal actuator for nanoscale in situ microscopy testing: design and characterization
    • Zhu Y., Corigliano A., and Espinosa H.D. A thermal actuator for nanoscale in situ microscopy testing: design and characterization. J. Micromech. Microeng. 16 (2006) 242
    • (2006) J. Micromech. Microeng. , vol.16 , pp. 242
    • Zhu, Y.1    Corigliano, A.2    Espinosa, H.D.3
  • 13
    • 71749103597 scopus 로고    scopus 로고
    • PolyMUMPS Service, MEMSCAP, Inc, Research Triangle Park, NC, USA
    • PolyMUMPS Service, MEMSCAP, Inc., Research Triangle Park, NC, USA.
  • 14
    • 33645984523 scopus 로고    scopus 로고
    • Simulation, measurement, and asymmetric buckling of thermal microactuators
    • Wittmer J.W., Baker M.S., and Howell L.L. Simulation, measurement, and asymmetric buckling of thermal microactuators. Sensors Actuat. A 128 (2006) 395
    • (2006) Sensors Actuat. A , vol.128 , pp. 395
    • Wittmer, J.W.1    Baker, M.S.2    Howell, L.L.3
  • 15
    • 0035368251 scopus 로고    scopus 로고
    • Bent beam electrothermal actuators. Part I. Single beam and cascaded devices
    • Que L., Park J.-S., and Gianchandani Y.B. Bent beam electrothermal actuators. Part I. Single beam and cascaded devices. J. MEMS 10 (2001) 247
    • (2001) J. MEMS , vol.10 , pp. 247
    • Que, L.1    Park, J.-S.2    Gianchandani, Y.B.3
  • 16
    • 33645166014 scopus 로고    scopus 로고
    • Macro-modeling for polysilicon cascaded bent beam electrothermal microactuators
    • Zhang Y., Huang Q.-A., Li R.G., and Li W. Macro-modeling for polysilicon cascaded bent beam electrothermal microactuators. Sensors Actuat. A 128 (2006) 165
    • (2006) Sensors Actuat. A , vol.128 , pp. 165
    • Zhang, Y.1    Huang, Q.-A.2    Li, R.G.3    Li, W.4
  • 17
    • 0035341460 scopus 로고    scopus 로고
    • Micromechanical devices with embedded electro-thermal-compliant actuation
    • Moulton T., and Ananthasuresh G.K. Micromechanical devices with embedded electro-thermal-compliant actuation. Sensors Actuat. A 90 (2001) 38
    • (2001) Sensors Actuat. A , vol.90 , pp. 38
    • Moulton, T.1    Ananthasuresh, G.K.2
  • 18
    • 2142812937 scopus 로고    scopus 로고
    • Techniques for measuring thermal expansion and creep of polysilicon
    • Oh C.-S., and Sharpe Jr. W.N. Techniques for measuring thermal expansion and creep of polysilicon. Sensors Actuat. A 112 (2004) 66
    • (2004) Sensors Actuat. A , vol.112 , pp. 66
    • Oh, C.-S.1    Sharpe Jr., W.N.2
  • 21
    • 34547141642 scopus 로고    scopus 로고
    • Laser-induced exfoliation of amorphous carbon layer on an individual multiwall carbon nanotube
    • Singh G., Rice P., Hurst K.E., Lehman J.H., and Mahajan R.L. Laser-induced exfoliation of amorphous carbon layer on an individual multiwall carbon nanotube. Appl. Phys. Lett. 91 (2007) 033101
    • (2007) Appl. Phys. Lett. , vol.91 , pp. 033101
    • Singh, G.1    Rice, P.2    Hurst, K.E.3    Lehman, J.H.4    Mahajan, R.L.5
  • 22
    • 53649088892 scopus 로고    scopus 로고
    • Simultaneous on-chip sensing and actuation using the thermomechanical in-plane microactuator
    • Waterfall T.L., Teichert K.B., and Jensen B.D. Simultaneous on-chip sensing and actuation using the thermomechanical in-plane microactuator. J. MEMS 17 (2008) 1204
    • (2008) J. MEMS , vol.17 , pp. 1204
    • Waterfall, T.L.1    Teichert, K.B.2    Jensen, B.D.3
  • 23
    • 85196536500 scopus 로고    scopus 로고
    • Fabrication and mechanical characterization of carbon nanotube based nanoknives
    • Chicago, IL, USA
    • Singh G., Rice P., McIntosh R., and Mahajan R.L. Fabrication and mechanical characterization of carbon nanotube based nanoknives. Proceedings of ASME IMECE2006. Chicago, IL, USA (2006) 14659
    • (2006) Proceedings of ASME IMECE2006 , pp. 14659
    • Singh, G.1    Rice, P.2    McIntosh, R.3    Mahajan, R.L.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.