A high-sensitivity and quasi-linear capacitive sensor for nanomechanical testing applications

Journal of Micromechanics and Microengineering

Volumn 19, Issue 7, 2009, Pages

  Zhang, Dongfeng ^a,b   Drissen, Walter ^a   Breguet, Jean Marc ^a   Clavel, Reymond ^a   Michler, Johann ^b  

^a EPFL   (Switzerland)

^b SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL EXPRESSIONS; CAPACITIVE SENSOR; DIFFERENTIAL CAPACITIVE SENSORS; DISPLACEMENT MEASUREMENTS; DISPLACEMENT RESOLUTION; EXCITATION SIGNALS; FABRICATED DEVICE; FINITE ELEMENT ANALYSIS; HIGH SENSITIVITY; IN-PLANE; MATERIAL TESTING SYSTEMS; MOVING RANGE; NANOMECHANICAL TESTING; ON CHIPS; PULL-IN VOLTAGE; QUASI-LINEAR; QUASI-STATIC; RESONANCE METHODS; SCANNING ELECTRON MICROSCOPE; SENSING ELECTRODE; SUSPENSION STIFFNESS;

CAPACITANCE; CAPACITANCE MEASUREMENT; ELECTRIC POTENTIAL; ELECTRON BEAMS; FABRICATION; LINEARIZATION; LOAD TESTING; MICROSCOPES; SCANNING ELECTRON MICROSCOPY; TENSILE TESTING;

SENSORS;

EID: 67849103828     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/7/075003     Document Type: Article

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