메뉴 건너뛰기




Volumn 28, Issue 19, 2012, Pages 7476-7483

A new route to fabricate large-area, compact Ag metal mesh films with ordered pores

Author keywords

[No Author keywords available]

Indexed keywords

AR PLASMAS; CHEMICAL DEPOSITION METHOD; ETCHING TIME; HIGH QUALITY; METAL MESH; METAL PARTICLE; METAL-ASSISTED CHEMICAL ETCHING; NUCLEATION AND GROWTH; SI NANOWIRE; SINGLE LAYER; TWO-STEP DEPOSITION;

EID: 84861163284     PISSN: 07437463     EISSN: 15205827     Source Type: Journal    
DOI: 10.1021/la300788r     Document Type: Article
Times cited : (8)

References (42)
  • 1
    • 16244388903 scopus 로고    scopus 로고
    • Controlled Growth of Si Nanowire Arrays for Device Integration
    • Hochbaum, A. I.; Fan, R.; He, R. R.; Yang, P. D. Controlled Growth of Si Nanowire Arrays for Device Integration Nano Lett. 2005, 5, 457-460
    • (2005) Nano Lett. , vol.5 , pp. 457-460
    • Hochbaum, A.I.1    Fan, R.2    He, R.R.3    Yang, P.D.4
  • 3
    • 48249084995 scopus 로고    scopus 로고
    • Wafer-Scale Patterning of Sub-40 nm Diameter and High Aspect Ratio (>50:1) Silicon Pillar Arrays by Nanoimprint and Etching
    • Morton, K. J.; Nieberg, G.; Bai, S. F.; Chou, S. Y. Wafer-Scale Patterning of Sub-40 nm Diameter and High Aspect Ratio (>50:1) Silicon Pillar Arrays by Nanoimprint and Etching Nanotechnology 2008, 19, 345301
    • (2008) Nanotechnology , vol.19 , pp. 345301
    • Morton, K.J.1    Nieberg, G.2    Bai, S.F.3    Chou, S.Y.4
  • 4
    • 53349143988 scopus 로고    scopus 로고
    • Wafer-Scale Silicon Nanopillars and Nanocones by Langmuir-Blodgett Assembly and Etching
    • Hsu, C. M.; Connor, S. T.; Tang, M. X.; Cui, Y. Wafer-Scale Silicon Nanopillars and Nanocones by Langmuir-Blodgett Assembly and Etching Appl. Phys. Lett. 2008, 93, 133109
    • (2008) Appl. Phys. Lett. , vol.93 , pp. 133109
    • Hsu, C.M.1    Connor, S.T.2    Tang, M.X.3    Cui, Y.4
  • 5
    • 14644409706 scopus 로고    scopus 로고
    • Controlled Fabrication of Silicon Nanowires by Electron Beam Lithography and Electrochemical Size Reduction
    • Juhasz, R.; Elfstrom, N.; Linnros, J. Controlled Fabrication of Silicon Nanowires by Electron Beam Lithography and Electrochemical Size Reduction Nano Lett. 2005, 5, 275-280
    • (2005) Nano Lett. , vol.5 , pp. 275-280
    • Juhasz, R.1    Elfstrom, N.2    Linnros, J.3
  • 6
    • 0345373824 scopus 로고    scopus 로고
    • Fabrication of Sub-10-nm Silicon Nanowire Arrays by Size Reduction Lithography
    • Choi, Y. K.; Zhu, J.; Grunes, J.; Bokor, J.; Somorjai, G. A. Fabrication of Sub-10-nm Silicon Nanowire Arrays by Size Reduction Lithography J. Phys. Chem. B 2003, 107, 3340-3343
    • (2003) J. Phys. Chem. B , vol.107 , pp. 3340-3343
    • Choi, Y.K.1    Zhu, J.2    Grunes, J.3    Bokor, J.4    Somorjai, G.A.5
  • 8
    • 0037118955 scopus 로고    scopus 로고
    • Synthesis of Large-Area Silicon Nanowire Arrays via Self-Assembling Nanoelectrochemistry
    • Peng, K. Q.; Yan, Y. J.; Gao, S. P.; Zhu, J. Synthesis of Large-Area Silicon Nanowire Arrays via Self-Assembling Nanoelectrochemistry Adv. Mater. 2002, 14, 1164-1167
    • (2002) Adv. Mater. , vol.14 , pp. 1164-1167
    • Peng, K.Q.1    Yan, Y.J.2    Gao, S.P.3    Zhu, J.4
  • 9
    • 33744822492 scopus 로고    scopus 로고
    • Silicon Vertically Integrated Nanowire Field Effect Transistors
    • Goldberger, J.; Hochbaum, A. I.; Fan, R.; Yang, P. D. Silicon Vertically Integrated Nanowire Field Effect Transistors Nano Lett. 2006, 6, 973-977
    • (2006) Nano Lett. , vol.6 , pp. 973-977
    • Goldberger, J.1    Hochbaum, A.I.2    Fan, R.3    Yang, P.D.4
  • 11
    • 78650825626 scopus 로고    scopus 로고
    • Silicon Nanowires for Photovoltaic Solar Energy Conversion
    • Peng, K. Q.; Lee, S. T. Silicon Nanowires for Photovoltaic Solar Energy Conversion Adv. Mater. 2011, 23, 198-215
    • (2011) Adv. Mater. , vol.23 , pp. 198-215
    • Peng, K.Q.1    Lee, S.T.2
  • 12
    • 27344455715 scopus 로고    scopus 로고
    • Fabrication and Application of Long Strands of Silicon Nanowires as Sensors for Bovine Serum Albumin Detection
    • Shao, M. W.; Yao, H.; Zhang, M. L.; Wong, N. B.; Shan, Y. Y. Fabrication and Application of Long Strands of Silicon Nanowires as Sensors for Bovine Serum Albumin Detection Appl. Phys. Lett. 2005, 87, 183106
    • (2005) Appl. Phys. Lett. , vol.87 , pp. 183106
    • Shao, M.W.1    Yao, H.2    Zhang, M.L.3    Wong, N.B.4    Shan, Y.Y.5
  • 13
    • 68249126857 scopus 로고    scopus 로고
    • Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated Using Block-Copolymer Lithography and Metal-Assisted Etching
    • Chang, S. W.; Chuang, V. P.; Boles, S. T.; Ross, C. A.; Thompson, C. V. Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated Using Block-Copolymer Lithography and Metal-Assisted Etching Adv. Funct. Mater. 2009, 19, 2495-2500
    • (2009) Adv. Funct. Mater. , vol.19 , pp. 2495-2500
    • Chang, S.W.1    Chuang, V.P.2    Boles, S.T.3    Ross, C.A.4    Thompson, C.V.5
  • 14
    • 33748896652 scopus 로고    scopus 로고
    • Silver Catalysis in the Fabrication of Silicon Nanowire Arrays
    • Fang, H.; Wu, Y.; Zhao, J. H.; Zhu, J. Silver Catalysis in the Fabrication of Silicon Nanowire Arrays Nanotechnology 2006, 17, 3768-3774
    • (2006) Nanotechnology , vol.17 , pp. 3768-3774
    • Fang, H.1    Wu, Y.2    Zhao, J.H.3    Zhu, J.4
  • 16
    • 34250660616 scopus 로고    scopus 로고
    • Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density
    • Huang, Z. P.; Fang, H.; Zhu, J. Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density Adv. Mater. 2007, 19, 744-748
    • (2007) Adv. Mater. , vol.19 , pp. 744-748
    • Huang, Z.P.1    Fang, H.2    Zhu, J.3
  • 17
    • 27744531407 scopus 로고    scopus 로고
    • Direct-Write Patterning of Microstructured Porous Silicon Arrays by Focused-Ion-Beam Pt Deposition and Metal-Assisted Electroless Etching
    • Chattopadhyay, S.; Bohn, P. W. Direct-Write Patterning of Microstructured Porous Silicon Arrays by Focused-Ion-Beam Pt Deposition and Metal-Assisted Electroless Etching J. App. Phys. 2004, 96, 6888-6894
    • (2004) J. App. Phys. , vol.96 , pp. 6888-6894
    • Chattopadhyay, S.1    Bohn, P.W.2
  • 18
    • 67650349085 scopus 로고    scopus 로고
    • Ordered Arrays of Vertically Aligned [110] Silicon Nanowires by Suppressing the Crystallographically Preferred 〈100〉 etching Directions
    • Huang, Z. P.; Shimizu, T.; Senz, S.; Zhang, Z.; Zhang, X. X.; Lee, W.; Geyer, N.; Goesele, U. Ordered Arrays of Vertically Aligned [110] Silicon Nanowires by Suppressing the Crystallographically Preferred 〈100〉 etching Directions Nano Lett. 2009, 9, 2519-2525
    • (2009) Nano Lett. , vol.9 , pp. 2519-2525
    • Huang, Z.P.1    Shimizu, T.2    Senz, S.3    Zhang, Z.4    Zhang, X.X.5    Lee, W.6    Geyer, N.7    Goesele, U.8
  • 19
  • 20
    • 61349110182 scopus 로고    scopus 로고
    • Extended Arrays of Vertically Aligned Sub-10 nm Diameter [100] Si Nanowires by Metal-Assisted Chemical Etching
    • Huang, Z. P.; Zhang, X. X.; Reiche, M.; Liu, L. F.; Lee, W.; Shimizu, T.; Senz, S.; Goesele, U. Extended Arrays of Vertically Aligned Sub-10 nm Diameter [100] Si Nanowires by Metal-Assisted Chemical Etching Nano Lett. 2008, 8, 3046-3051
    • (2008) Nano Lett. , vol.8 , pp. 3046-3051
    • Huang, Z.P.1    Zhang, X.X.2    Reiche, M.3    Liu, L.F.4    Lee, W.5    Shimizu, T.6    Senz, S.7    Goesele, U.8
  • 21
    • 0035850509 scopus 로고    scopus 로고
    • Catalytic Amplification of the Soft Lithographic Patterning of Si. Nonelectrochemical Orthogonal Fabrication of Photoluminescenct Porous Si Pixel Arrays
    • Harada, Y.; Li, X. L.; Bohn, P. W.; Nuzzo, R. G. Catalytic Amplification of the Soft Lithographic Patterning of Si. Nonelectrochemical Orthogonal Fabrication of Photoluminescenct Porous Si Pixel Arrays J. Am. Chem. Soc. 2001, 123, 8709-8717
    • (2001) J. Am. Chem. Soc. , vol.123 , pp. 8709-8717
    • Harada, Y.1    Li, X.L.2    Bohn, P.W.3    Nuzzo, R.G.4
  • 22
    • 18844385524 scopus 로고    scopus 로고
    • Uniform, Axial-Orientation Alignment of One-Dimensional Single-crystal Silicon Nanostructure Arrays
    • Peng, K. Q.; Wu, Y.; Fang, H.; Zhong, X. Y.; Xu, Y.; Zhu, J. Uniform, Axial-Orientation Alignment of One-Dimensional Single-crystal Silicon Nanostructure Arrays Angew. Chem., Int. Ed. 2005, 44, 2737-2742
    • (2005) Angew. Chem., Int. Ed. , vol.44 , pp. 2737-2742
    • Peng, K.Q.1    Wu, Y.2    Fang, H.3    Zhong, X.Y.4    Xu, Y.5    Zhu, J.6
  • 23
    • 32244438112 scopus 로고    scopus 로고
    • Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles
    • Peng, K. Q.; Hu, J. J.; Yan, Y. J.; Wu, Y.; Fang, H.; Xu, Y.; Lee, S. T.; Zhu, J. Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles Adv. Funct. Mater. 2006, 16, 387-394
    • (2006) Adv. Funct. Mater. , vol.16 , pp. 387-394
    • Peng, K.Q.1    Hu, J.J.2    Yan, Y.J.3    Wu, Y.4    Fang, H.5    Xu, Y.6    Lee, S.T.7    Zhu, J.8
  • 24
    • 72649093302 scopus 로고    scopus 로고
    • Electroless Deposition of W-Doped Ag Films onto p-Si(100) from Diluted HF Solution
    • Ye, W. C.; Ma, C. L.; Wang, C. M.; Zhou, F. Electroless Deposition of W-Doped Ag Films onto p-Si(100) from Diluted HF Solution Trans. Nonferrous Met. Soc. China 2009, 19, 1474-1478
    • (2009) Trans. Nonferrous Met. Soc. China , vol.19 , pp. 1474-1478
    • Ye, W.C.1    Ma, C.L.2    Wang, C.M.3    Zhou, F.4
  • 25
    • 0043131861 scopus 로고    scopus 로고
    • Formation of Porous Silicon by Metal Particle Enhanced Chemical Etching in HF Solution and Its Application for Efficient Solar Cells
    • Yae, S.; Kawamoto, Y.; Tanaka, H.; Fukumuro, N.; Matsuda, H. Formation of Porous Silicon by Metal Particle Enhanced Chemical Etching in HF Solution and Its Application for Efficient Solar Cells Electrochem. Commun. 2003, 5, 632-636
    • (2003) Electrochem. Commun. , vol.5 , pp. 632-636
    • Yae, S.1    Kawamoto, Y.2    Tanaka, H.3    Fukumuro, N.4    Matsuda, H.5
  • 26
    • 79952405359 scopus 로고    scopus 로고
    • Electric Field Induced Au Nanoparticles with Controllable Morphology under Surfactantless Condition
    • Liu, G. Q.; Cai, W. P.; Wang, J. J.; Duan, G. T. Electric Field Induced Au Nanoparticles with Controllable Morphology under Surfactantless Condition Nanosci. Nanotechnol. Lett. 2010, 2, 248-252
    • (2010) Nanosci. Nanotechnol. Lett. , vol.2 , pp. 248-252
    • Liu, G.Q.1    Cai, W.P.2    Wang, J.J.3    Duan, G.T.4
  • 27
    • 84856223054 scopus 로고    scopus 로고
    • Silver Nanostructure Arrays Abundant in Sub-5 nm Gaps as Highly Raman-Enhancing Substrates
    • Wang, J.; Huang, L. Q.; Yuan, L.; Zhao, L. H.; Feng, X. H.; Zhang, W. W.; Zhai, L. P.; Zhu, J. Silver Nanostructure Arrays Abundant in Sub-5 nm Gaps as Highly Raman-Enhancing Substrates Appl. Surf. Sci. 2012, 258, 3519-3523
    • (2012) Appl. Surf. Sci. , vol.258 , pp. 3519-3523
    • Wang, J.1    Huang, L.Q.2    Yuan, L.3    Zhao, L.H.4    Feng, X.H.5    Zhang, W.W.6    Zhai, L.P.7    Zhu, J.8
  • 28
    • 53449087908 scopus 로고    scopus 로고
    • Enhancements in Intensity and Stability of Surface-Enhanced Raman Scattering on Optimally Electrochemically Roughened Silver Substrates
    • Yang, K. H.; Liu, Y. C.; Yu, C. C. Enhancements in Intensity and Stability of Surface-Enhanced Raman Scattering on Optimally Electrochemically Roughened Silver Substrates J. Mater. Chem. 2008, 18, 4849-4855
    • (2008) J. Mater. Chem. , vol.18 , pp. 4849-4855
    • Yang, K.H.1    Liu, Y.C.2    Yu, C.C.3
  • 29
    • 80053217779 scopus 로고    scopus 로고
    • Plasmonic Backscattering Enhanced Inverted Photovoltaics
    • Dissanayake, D. M. N. M.; Roberts, B.; Ku, P. C. Plasmonic Backscattering Enhanced Inverted Photovoltaics Appl. Phys. Lett. 2011, 99, 113306
    • (2011) Appl. Phys. Lett. , vol.99 , pp. 113306
    • Dissanayake, D.M.N.M.1    Roberts, B.2    Ku, P.C.3
  • 30
    • 65249119693 scopus 로고    scopus 로고
    • Controllable Fabrication and Tunable Magnetism of Nickel Nanostructured Ordered Porous Arrays
    • Yang, J. L.; Duan, G. T.; Cai, W. P. Controllable Fabrication and Tunable Magnetism of Nickel Nanostructured Ordered Porous Arrays J. Phys. Chem. C 2009, 113, 3973-3977
    • (2009) J. Phys. Chem. C , vol.113 , pp. 3973-3977
    • Yang, J.L.1    Duan, G.T.2    Cai, W.P.3
  • 32
    • 77955022552 scopus 로고    scopus 로고
    • Periodic Si Nanopillar Arrays Fabricated by Colloidal Lithography and Catalytic Etching for Broadband and Omnidirectional Elimination of Fresnel Reflection
    • Wang, H. P.; Lai, K. Y.; Lin, Y. R.; Lin, C. A.; He, H., Jr Periodic Si Nanopillar Arrays Fabricated by Colloidal Lithography and Catalytic Etching for Broadband and Omnidirectional Elimination of Fresnel Reflection Langmuir 2010, 26, 12855-12858
    • (2010) Langmuir , vol.26 , pp. 12855-12858
    • Wang, H.P.1    Lai, K.Y.2    Lin, Y.R.3    Lin, C.A.4    He Jr., H.5
  • 33
    • 36148968077 scopus 로고    scopus 로고
    • Nanocluster Nucleation and Growth Kinetic and Mechanistic Studies: A Review Emphasizing Transition-Metal Nanoclusters
    • Finney, E. E.; Finke, R. G. Nanocluster Nucleation and Growth Kinetic and Mechanistic Studies: A Review Emphasizing Transition-Metal Nanoclusters J. Colloid Interface Sci. 2008, 317, 351-374
    • (2008) J. Colloid Interface Sci. , vol.317 , pp. 351-374
    • Finney, E.E.1    Finke, R.G.2
  • 34
    • 0042701707 scopus 로고    scopus 로고
    • A Method for Selective Deposition of Copper Nanoparticles on Silicon Surfaces
    • Choi, J.; Chen, Z.; Singh, R. K. A Method for Selective Deposition of Copper Nanoparticles on Silicon Surfaces J. Electrochem. Soc. 2003, 150, C563-C565
    • (2003) J. Electrochem. Soc. , vol.150
    • Choi, J.1    Chen, Z.2    Singh, R.K.3
  • 35
    • 84861125129 scopus 로고    scopus 로고
    • The Impact of Catalysis of Silicon Surface on the Formation of Silver Film in Electroless Silver Deposition
    • Tong, H.; Ye, W. C.; Chang, Y. L.; Wang, C. M.; Li, H. L. The Impact of Catalysis of Silicon Surface on the Formation of Silver Film in Electroless Silver Deposition J. Lanzhou Uni. 2006, 42, 79-85
    • (2006) J. Lanzhou Uni. , vol.42 , pp. 79-85
    • Tong, H.1    Ye, W.C.2    Chang, Y.L.3    Wang, C.M.4    Li, H.L.5
  • 36
    • 79959188013 scopus 로고    scopus 로고
    • Gold Quasi Rod-Shaped Nanoparticle-Built Hierarchically Micro/Nanostructured Pore Array via Clean Electrodeposition on A Colloidal Monolayer and Its Structurally Enhanced SERS Performance
    • Wang, J. J.; Duan, G. T.; Liu, G. Q.; Li, Y.; Dai, Z. F.; Zhang, H. W.; Cai., W. P. Gold Quasi Rod-Shaped Nanoparticle-Built Hierarchically Micro/Nanostructured Pore Array via Clean Electrodeposition on A Colloidal Monolayer and Its Structurally Enhanced SERS Performance J. Mater. Chem. 2011, 21, 8816-8821
    • (2011) J. Mater. Chem. , vol.21 , pp. 8816-8821
    • Wang, J.J.1    Duan, G.T.2    Liu, G.Q.3    Li, Y.4    Dai, Z.F.5    Zhang, H.W.6    Cai, W.P.7
  • 37
    • 79961012175 scopus 로고    scopus 로고
    • Nanowire Arrays with Controlled Structure Profiles for Maximizing Optical Collection Efficiency
    • Chang, H. C.; Lai, K. Y.; Dai, Y. A.; Wang, H. H.; Lin, C. A.; He, H., Jr. Nanowire Arrays with Controlled Structure Profiles for Maximizing Optical Collection Efficiency Energy Environ. Sci. 2011, 4, 2863-2869
    • (2011) Energy Environ. Sci. , vol.4 , pp. 2863-2869
    • Chang, H.C.1    Lai, K.Y.2    Dai, Y.A.3    Wang, H.H.4    Lin, C.A.5    He Jr., H.6
  • 38
    • 74249111373 scopus 로고    scopus 로고
    • Matrix-Free Laser Desorption/Ionization Mass Spectrometry on Silicon Nanowire Arrays Prepared by Chemical Etching of Crystalline Silicon
    • Piret, G.; Drobecq, H.; Coffinier, Y.; Melnyk, O.; Boukherroub, R. Matrix-Free Laser Desorption/Ionization Mass Spectrometry on Silicon Nanowire Arrays Prepared by Chemical Etching of Crystalline Silicon Langmuir 2010, 26, 1354-1361
    • (2010) Langmuir , vol.26 , pp. 1354-1361
    • Piret, G.1    Drobecq, H.2    Coffinier, Y.3    Melnyk, O.4    Boukherroub, R.5
  • 39
    • 84855453583 scopus 로고    scopus 로고
    • Periodic Si Nanopillar Arrays by Anodic Aluminum Oxide Template and Catalytic Etching for Broadband and Omnidirectional Light Harvesting
    • Wang, H. P.; Tsai, K. T.; Wei, T. C.; Wang, Y. L.; He, H., Jr. Periodic Si Nanopillar Arrays by Anodic Aluminum Oxide Template and Catalytic Etching for Broadband and Omnidirectional Light Harvesting Opt. Express 2012, 20, A94-A103
    • (2012) Opt. Express , vol.20
    • Wang, H.P.1    Tsai, K.T.2    Wei, T.C.3    Wang, Y.L.4    He Jr., H.5
  • 40
    • 79955419752 scopus 로고    scopus 로고
    • Au/Ag Bilayered Metal Mesh as a Si Etching Catalyst for Controlled Fabrication of Si Nanowires
    • Kim, J.; Han, H.; Kim, Y. H.; Choi, S. -H.; Kim, J. -C.; Lee, W. Au/Ag Bilayered Metal Mesh as a Si Etching Catalyst for Controlled Fabrication of Si Nanowires ACS Nano 2011, 5, 3222-3229
    • (2011) ACS Nano , vol.5 , pp. 3222-3229
    • Kim, J.1    Han, H.2    Kim, Y.H.3    Choi, S.-H.4    Kim, J.-C.5    Lee, W.6
  • 41
    • 79959783344 scopus 로고    scopus 로고
    • Curved Silicon Nanowires with Ribbon-like Cross Sections by Metal-Assisted Chemical Etching
    • Kim, J.; Kim, Y. H.; Choi, S. -H.; Lee, W. Curved Silicon Nanowires with Ribbon-like Cross Sections by Metal-Assisted Chemical Etching ACS Nano 2011, 5, 5242-5248
    • (2011) ACS Nano , vol.5 , pp. 5242-5248
    • Kim, J.1    Kim, Y.H.2    Choi, S.-H.3    Lee, W.4
  • 42
    • 33750349069 scopus 로고
    • A Simple Method for the Production of a Two-Dimensional, Ordered Array of Small Latex Particles
    • Micheletto, R.; Fukuda, H.; Ohtsu, M. A Simple Method for the Production of a Two-Dimensional, Ordered Array of Small Latex Particles Langmuir 1995, 11, 3333-3336
    • (1995) Langmuir , vol.11 , pp. 3333-3336
    • Micheletto, R.1    Fukuda, H.2    Ohtsu, M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.