Curved silicon nanowires with ribbon-like cross sections by metal-assisted chemical etching

ACS Nano

Volumn 5, Issue 6, 2011, Pages 5242-5248

  Kim, Jungkil ^a,c   Kim, Young Heon ^a   Choi, Suk Ho ^c   Lee, Woo ^a,b  

^a Korea Research Institute of Standards and Science   (South Korea)

^b University of Science and Technology (UST)   (South Korea)

^c Kyung Hee University   (South Korea)

Author keywords

anodic aluminum oxide (AAO); curved Si nanowires; gold mesh; metal assisted chemical etching; Si nanoribbons

Indexed keywords

ANODIC ALUMINUM OXIDE; CHEMICAL ETCHING; CROSS SECTION; CURVED SI NANOWIRES; ETCHING CONDITION; GENERIC PROCESS; METAL-ASSISTED CHEMICAL ETCHING; MIXTURE SOLUTION; ORIENTED SILICON; SILICON NANOSTRUCTURES; SILICON NANOWIRES; SYNTHETIC APPROACH; THIN GOLD FILM; TURNING ANGLES; ULTRA-THIN;

ANODIC OXIDATION; CRYSTAL ORIENTATION; ETCHING; HYDROFLUORIC ACID; NANOWIRES; SEMICONDUCTING SILICON COMPOUNDS; ULTRATHIN FILMS;

SILICON WAFERS;

EID: 79959783344     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn2014358     Document Type: Article

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