|
Volumn 123, Issue 36, 2001, Pages 8709-8717
|
Catalytic amplification of the soft lithographic patterning of Si. Nonelectrochemical orthogonal fabrication of photoluminescent porous Si pixel arrays
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CATALYTIC AMPLIFICATION;
ARRAYS;
CATALYSIS;
DISSOLUTION;
ETCHING;
FABRICATION;
LITHOGRAPHY;
MICROMETERS;
MICROSTRUCTURE;
PHOTOLUMINESCENCE;
PLATINUM;
SCANNING ELECTRON MICROSCOPY;
SILANES;
POROUS SILICON;
SILANE DERIVATIVE;
SILICONE DERIVATIVE;
ARTICLE;
CHEMICAL COMPOSITION;
CRYSTAL STRUCTURE;
DISSOLUTION;
ELECTROCHEMICAL ANALYSIS;
LUMINESCENCE;
OXIDATION;
SCANNING ELECTRON MICROSCOPY;
|
EID: 0035850509
PISSN: 00027863
EISSN: None
Source Type: Journal
DOI: 10.1021/ja010367j Document Type: Article |
Times cited : (81)
|
References (46)
|