Wafer-scale silicon nanopillars and nanocones by Langmuir-Blodgett assembly and etching

Applied Physics Letters

Volumn 93, Issue 13, 2008, Pages

  Hsu, Ching Mei ^a   Connor, Stephen T ^b   Tang, Mary X ^a   Cui, Yi ^a  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SEPARATION; SILICON; SILICON WAFERS; SOLAR ENERGY;

LANGMUIR-BLODGETT ASSEMBLY; NANO-CONES; NANO-IMPRINTING; NANO-PILLARS; PRECISE CONTROL; RADIUS OF CURVATURE; REACTIVE ION; SCANNING PROBES; SILICON NANOPILLARS; UNIFORM COVERAGE; WAFER-SCALE;

REACTIVE ION ETCHING;

EID: 53349143988     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2988893     Document Type: Article

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