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Volumn 59, Issue 12, 2012, Pages 4914-4920

Deformable carbon nanotube-contact pads for inertial microswitch to extend contact time

Author keywords

Carbon nanotube (CNT); deformable contact pad; extended contact time; inertial microswitch

Indexed keywords

COMMERCIAL APPLICATIONS; CONTACT MATERIAL; CONTACT PADS; CONTACT TIME; DEFORMABLE CONTACTS; ELECTRICAL CONDUCTIVITY; HEALTH-CARE SYSTEM; IN-VEHICLE; MECHANICAL FLEXIBILITY; MICROSWITCHES; RESTRAINT SYSTEMS; SELF-ASSEMBLED; SINGLE CRYSTAL SILICON; THRESHOLD ACCELERATION;

EID: 84860470864     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2011.2163918     Document Type: Article
Times cited : (45)

References (36)
  • 1
    • 79954475281 scopus 로고    scopus 로고
    • Torsional-vibration assessment and gear-fault diagnosis in railway traction system
    • May
    • H. Henao, S. H. Kia, and G. Capolino, "Torsional-vibration assessment and gear-fault diagnosis in railway traction system," IEEE Trans. Ind. Electron., vol. 58, no. 5, pp. 1707-1717, May 2011.
    • (2011) IEEE Trans. Ind. Electron. , vol.58 , Issue.5 , pp. 1707-1717
    • Henao, H.1    Kia, S.H.2    Capolino, G.3
  • 2
    • 77954610322 scopus 로고    scopus 로고
    • Control ofmanipulator using pneumatic muscles for enhanced safety
    • Aug.
    • T.-Y. Choi and J.-J. Lee, "Control ofmanipulator using pneumatic muscles for enhanced safety," IEEE Trans. Ind. Electron., vol. 57, no. 8, pp. 2815-2825, Aug. 2010.
    • (2010) IEEE Trans. Ind. Electron. , vol.57 , Issue.8 , pp. 2815-2825
    • Choi, T.-Y.1    Lee, J.-J.2
  • 3
    • 79960374182 scopus 로고    scopus 로고
    • Towards miniaturization of a MEMS-based wearable motion capture system
    • Aug.
    • C. M. N. Brigante, N. Abbate, A. Basile, A. C. Faulisi, and S. Sessa, "Towards miniaturization of a MEMS-based wearable motion capture system," IEEE Trans. Ind. Electron., vol. 58, no. 8, pp. 3234-3241, Aug. 2011.
    • (2011) IEEE Trans. Ind. Electron. , vol.58 , Issue.8 , pp. 3234-3241
    • Brigante, C.M.N.1    Abbate, N.2    Basile, A.3    Faulisi, A.C.4    Sessa, S.5
  • 4
    • 77956609153 scopus 로고    scopus 로고
    • An inertial-measurement-unitbased pen with a trajectory reconstruction algorithm and its applications
    • Oct.
    • J.-S. Wang, Y.-L. Hsu, and J.-N. Liu, "An inertial-measurement- unitbased pen with a trajectory reconstruction algorithm and its applications," IEEE Trans. Ind. Electron., vol. 57, no. 10, pp. 3508-3521, Oct. 2010.
    • (2010) IEEE Trans. Ind. Electron. , vol.57 , Issue.10 , pp. 3508-3521
    • Wang, J.-S.1    Hsu, Y.-L.2    Liu, J.-N.3
  • 5
    • 0037103967 scopus 로고    scopus 로고
    • Acceleration switch with extended holding time using squeeze film effect for side airbag systems
    • Aug.
    • T. Matsunaga and M. Esashi, "Acceleration switch with extended holding time using squeeze film effect for side airbag systems," Sens. Actuators A, Phys., vol. 100, no. 1, pp. 10-17, Aug. 2002.
    • (2002) Sens. Actuators A, Phys. , vol.100 , Issue.1 , pp. 10-17
    • Matsunaga, T.1    Esashi, M.2
  • 6
    • 50349089613 scopus 로고    scopus 로고
    • A novel threshold accelerometer with postbuckling structures for airbag restraint systems
    • Aug.
    • J. Zhao, J. Jia, H. Wang, and W. Li, "A novel threshold accelerometer with postbuckling structures for airbag restraint systems," IEEE Sensors J., vol. 7, no. 8, pp. 1102-1109, Aug. 2007.
    • (2007) IEEE Sensors J. , vol.7 , Issue.8 , pp. 1102-1109
    • Zhao, J.1    Jia, J.2    Wang, H.3    Li, W.4
  • 7
    • 33744510548 scopus 로고    scopus 로고
    • Optimized design of a micromachined G-switch based on contactless configuration for health care applications
    • A. Ongkodjojo and F. E. H. Tay, "Optimized design of a micromachined G-switch based on contactless configuration for health care applications," J. Phys.: Conf. Ser., vol. 34, pp. 1044-1052, 2006.
    • (2006) J. Phys.: Conf. Ser. , vol.34 , pp. 1044-1052
    • Ongkodjojo, A.1    Tay, F.E.H.2
  • 8
    • 0033688283 scopus 로고    scopus 로고
    • Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications
    • Jun.
    • S. Michaelis, H. Timme, M. Wycisk, and J. Binder, "Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications," J. Micromech. Microeng., vol. 10, no. 2, pp. 120-123, Jun. 2000.
    • (2000) J. Micromech. Microeng. , vol.10 , Issue.2 , pp. 120-123
    • Michaelis, S.1    Timme, H.2    Wycisk, M.3    Binder, J.4
  • 9
    • 0015282064 scopus 로고
    • Microminiature ganged threshold accelerometers compatible with integrated circuit technology
    • Jan.
    • W. D. Frobenius, S. A. Zeitman, M. H. White, D. D. O'Sullivan, and R. G. Hamel, "Microminiature ganged threshold accelerometers compatible with integrated circuit technology," IEEE Trans. Electron Devices, vol. ED-19, no. 1, pp. 37-40, Jan. 1972.
    • (1972) IEEE Trans. Electron Devices , vol.ED-19 , Issue.1 , pp. 37-40
    • Frobenius, W.D.1    Zeitman, S.A.2    White, M.H.3    O'Sullivan, D.D.4    Hamel, R.G.5
  • 10
    • 0029732662 scopus 로고    scopus 로고
    • Low power, wide range threshold acceleration sensing system
    • Feb.
    • A. Selvakumar, N. Yazdi, and K. Najafi, "Low power, wide range threshold acceleration sensing system," in Proc. IEEE 10th Int. Conf. MEMS, Feb. 1996, pp. 186-191.
    • (1996) Proc. IEEE 10th Int. Conf. MEMS , pp. 186-191
    • Selvakumar, A.1    Yazdi, N.2    Najafi, K.3
  • 11
    • 77950605105 scopus 로고    scopus 로고
    • A bistable threshold accelerometer with fully compliant clamped-clamped mechanism
    • May
    • J. Zhao, Y. Yang, K. Fan, P. Hu, and H. Wang, "A bistable threshold accelerometer with fully compliant clamped-clamped mechanism," IEEE Sensors J., vol. 10, no. 5, pp. 1019-1024, May 2010.
    • (2010) IEEE Sensors J. , vol.10 , Issue.5 , pp. 1019-1024
    • Zhao, J.1    Yang, Y.2    Fan, K.3    Hu, P.4    Wang, H.5
  • 12
    • 50549091729 scopus 로고    scopus 로고
    • A MEMS inertia switch with bridge-type elastic fixed electrode for long duration contact
    • Sep.
    • Z. Yang, G. Ding, H. Cai, and X. Zhao, "A MEMS inertia switch with bridge-type elastic fixed electrode for long duration contact," IEEE Trans. Electron Devices, vol. 55, no. 9, pp. 2492-2497, Sep. 2008.
    • (2008) IEEE Trans. Electron Devices , vol.55 , Issue.9 , pp. 2492-2497
    • Yang, Z.1    Ding, G.2    Cai, H.3    Zhao, X.4
  • 13
    • 34249048951 scopus 로고    scopus 로고
    • Micro-cantilever shocking-acceleration switches with threshold adjusting and "on" -state latching functions
    • Mar.
    • M. Jia, X. Li, Z. Song, M. Bao, Y. Wang, and H. Yang, "Micro-cantilever shocking-acceleration switches with threshold adjusting and "on"-state latching functions," J. Micromech. Microeng., vol. 17, no. 3, pp. 567-575, Mar. 2007.
    • (2007) J. Micromech. Microeng. , vol.17 , Issue.3 , pp. 567-575
    • Jia, M.1    Li, X.2    Song, Z.3    Bao, M.4    Wang, Y.5    Yang, H.6
  • 14
    • 77949369388 scopus 로고    scopus 로고
    • A novel magnetic actuated bistable acceleration switch with low contact resistance
    • Apr.
    • J. Zhao, Y. Tang, H.Wang, and J. Jia, "A novel magnetic actuated bistable acceleration switch with low contact resistance," IEEE Sensors J., vol. 10, no. 4, pp. 869-876, Apr. 2010.
    • (2010) IEEE Sensors J. , vol.10 , Issue.4 , pp. 869-876
    • Zhao, J.1    Tang, Y.2    Wang, H.3    Jia, J.4
  • 15
    • 34547691065 scopus 로고    scopus 로고
    • Design, simulation and characterization of an inertia micro-switch fabricated by nonsilicon surface micromachining
    • Aug.
    • Z. Yang, G. Ding, W. Chen, S. Fu, X. Sun, and X. Zhao, "Design, simulation and characterization of an inertia micro-switch fabricated by nonsilicon surface micromachining," J. Micromech. Microeng., vol. 17, no. 8, pp. 1598-1604, Aug. 2007.
    • (2007) J. Micromech. Microeng. , vol.17 , Issue.8 , pp. 1598-1604
    • Yang, Z.1    Ding, G.2    Chen, W.3    Fu, S.4    Sun, X.5    Zhao, X.6
  • 16
    • 77951997765 scopus 로고    scopus 로고
    • An acceleration switch with a robust latching mechanism and cylindrical contact
    • May
    • Z. Guo, Q. Zhao, L. Lin, H. Ding, X. Liu, J. Cui, Z. Yang, H. Xie, and G. Yan, "An acceleration switch with a robust latching mechanism and cylindrical contact," J. Micromech. Microeng., vol. 20, no. 5, p. 055 006, May 2010.
    • (2010) J. Micromech. Microeng. , vol.20 , Issue.5 , pp. 055-006
    • Guo, Z.1    Zhao, Q.2    Lin, L.3    Ding, H.4    Liu, X.5    Cui, J.6    Yang, Z.7    Xie, H.8    Yan, G.9
  • 17
    • 67849106623 scopus 로고    scopus 로고
    • Analysis and elimination of the 'skip contact' phenomenon in an inertial micro-switch for prolonging its contact time
    • Apr.
    • Z. Yang, G. Ding, H. Cai, X. Xu, H. Wang, and X. Zhao, "Analysis and elimination of the 'skip contact' phenomenon in an inertial micro-switch for prolonging its contact time," J. Micromech. Microeng., vol. 19, no. 4, p. 045 017, Apr. 2009.
    • (2009) J. Micromech. Microeng. , vol.19 , Issue.4 , pp. 045017
    • Yang, Z.1    Ding, G.2    Cai, H.3    Xu, X.4    Wang, H.5    Zhao, X.6
  • 18
    • 0030126336 scopus 로고    scopus 로고
    • Probing electrical transport in nanomaterials: Conductivity of individual carbon nanotubes
    • Apr.
    • H. Dai, E. Wong, and C. Lieber, "Probing electrical transport in nanomaterials: Conductivity of individual carbon nanotubes," Science, vol. 272, no. 5261, pp. 523-526, Apr. 1996.
    • (1996) Science , vol.272 , Issue.5261 , pp. 523-526
    • Dai, H.1    Wong, E.2    Lieber, C.3
  • 19
    • 0029233544 scopus 로고
    • Mechanical and thermal properties of carbon nanotubes
    • Feb.
    • R. S. Ruoff and D. C. Lorents, "Mechanical and thermal properties of carbon nanotubes," Carbon, vol. 33, no. 7, pp. 925-930, Feb. 1995.
    • (1995) Carbon , vol.33 , Issue.7 , pp. 925-930
    • Ruoff, R.S.1    Lorents, D.C.2
  • 20
    • 17544380334 scopus 로고    scopus 로고
    • Wear-resistance comparison of carbon nanotubes and conventional silicon-probes for atomic force microscopy
    • Jun.
    • L. Guo, R. Wang, H. Xu, and J. Liang, "Wear-resistance comparison of carbon nanotubes and conventional silicon-probes for atomic force microscopy," Wear, vol. 258, no. 11/12, pp. 1836-1839, Jun. 2005.
    • (2005) Wear , vol.258 , Issue.11-12 , pp. 1836-1839
    • Guo, L.1    Wang, R.2    Xu, H.3    Liang, J.4
  • 21
    • 28144446036 scopus 로고    scopus 로고
    • Super-compressible foamlike carbon nanotube films
    • Nov.
    • A. Cao, P. L. Dickrell, W. G. Sawyer, M. H. Ghasemi-Nejhad, and P. M. Ajayan, "Super-compressible foamlike carbon nanotube films," Science, vol. 310, no. 5752, pp. 1307-1310, Nov. 2005.
    • (2005) Science , vol.310 , Issue.5752 , pp. 1307-1310
    • Cao, A.1    Dickrell, P.L.2    Sawyer, W.G.3    Ghasemi-Nejhad, M.H.4    Ajayan, P.M.5
  • 22
    • 34447116383 scopus 로고    scopus 로고
    • Fatigue resistance of aligned carbon nanotube arrays under cyclic compression
    • Jul.
    • J. Suhr, P. Victor, L. Ci, S. Sreekala, X. Zhang, O. Nalamasu, and P. M. Ajayan, "Fatigue resistance of aligned carbon nanotube arrays under cyclic compression," Nat. Nanotechnol., vol. 2, no. 7, pp. 417-421, Jul. 2007.
    • (2007) Nat. Nanotechnol. , vol.2 , Issue.7 , pp. 417-421
    • Suhr, J.1    Victor, P.2    Ci, L.3    Sreekala, S.4    Zhang, X.5    Nalamasu, O.6    Ajayan, P.M.7
  • 23
  • 25
    • 0038444573 scopus 로고    scopus 로고
    • Local synthesis of silicon nanowires and carbon nanotubes on microbridges
    • Jun.
    • O. Englander, D. Christensen, and L. Lin, "Local synthesis of silicon nanowires and carbon nanotubes on microbridges," Appl. Phys. Lett., vol. 82, no. 26, pp. 4797-4799, Jun. 2003.
    • (2003) Appl. Phys. Lett. , vol.82 , Issue.26 , pp. 4797-4799
    • Englander, O.1    Christensen, D.2    Lin, L.3
  • 26
    • 1942500874 scopus 로고    scopus 로고
    • A curved-beam bistable mechanism
    • Apr.
    • J. Qiu, J. H. Lang, and A. H. Slocum, "A curved-beam bistable mechanism," J. Microelectromech. Syst., vol. 13, no. 2, pp. 137-146, Apr. 2004.
    • (2004) J. Microelectromech. Syst. , vol.13 , Issue.2 , pp. 137-146
    • Qiu, J.1    Lang, J.H.2    Slocum, A.H.3
  • 27
    • 77952746551 scopus 로고    scopus 로고
    • Development of carbon nanotubes contact-based linear displacement sensor with large sensing range
    • Jan.
    • J.-I. Lee, J. Choi, K. Lee, B. Jeong, and J. Kim, "Development of carbon nanotubes contact-based linear displacement sensor with large sensing range," in Proc. IEEE 23rd Int. Conf. MEMS, Jan. 2010, pp. 627-630.
    • (2010) Proc. IEEE 23rd Int. Conf. MEMS , pp. 627-630
    • Lee, J.-I.1    Choi, J.2    Lee, K.3    Jeong, B.4    Kim, J.5
  • 28
    • 67349140908 scopus 로고    scopus 로고
    • Design of MEMS vertical-horizontal chevron thermal actuators
    • Jun.
    • J. Varona, M. Tecpoyotl-Torres, and A. A. Hamoui, "Design of MEMS vertical-horizontal chevron thermal actuators," Sens. Actuators A, Phys., vol. 153, no. 1, pp. 127-130, Jun. 2009.
    • (2009) Sens. Actuators A, Phys. , vol.153 , Issue.1 , pp. 127-130
    • Varona, J.1    Tecpoyotl-Torres, M.2    Hamoui, A.A.3
  • 29
    • 41049083003 scopus 로고    scopus 로고
    • Abrupt self-termination of vertically aligned carbon nanotube growth
    • Mar.
    • E. R. Meshot and A. J. Hart, "Abrupt self-termination of vertically aligned carbon nanotube growth," Appl. Phys. Lett., vol. 92, no. 11, p. 113 107, Mar. 2008.
    • (2008) Appl. Phys. Lett. , vol.92 , Issue.11 , pp. 113-107
    • Meshot, E.R.1    Hart, A.J.2
  • 31
    • 33745063923 scopus 로고    scopus 로고
    • The dynamic response of resistive microswitches: Switching time and bouncing
    • Jul.
    • A. Granaldi and P. Decuzzi, "The dynamic response of resistive microswitches: Switching time and bouncing," J. Micromech. Microeng., vol. 16, no. 7, pp. 1108-1115, Jul. 2006.
    • (2006) J. Micromech. Microeng. , vol.16 , Issue.7 , pp. 1108-1115
    • Granaldi, A.1    Decuzzi, P.2
  • 32
    • 65549086672 scopus 로고    scopus 로고
    • Microscale liquid-metal switches-A review
    • Apr.
    • P. Sen and C.-J. Kim, "Microscale liquid-metal switches-A review," IEEE Trans. Ind. Electron., vol. 56, no. 4, pp. 1314-1330, Apr. 2009.
    • (2009) IEEE Trans. Ind. Electron. , vol.56 , Issue.4 , pp. 1314-1330
    • Sen, P.1    Kim, C.-J.2
  • 33
    • 14944365228 scopus 로고    scopus 로고
    • Fundamental studies of Au contacts in MEMS RF switches
    • Feb.
    • S. T. Patton and J. S. Zabinski, "Fundamental studies of Au contacts in MEMS RF switches," Tribol. Lett., vol. 18, no. 2, pp. 215-230, Feb. 2005.
    • (2005) Tribol. Lett. , vol.18 , Issue.2 , pp. 215-230
    • Patton, S.T.1    Zabinski, J.S.2
  • 34
    • 78049363155 scopus 로고    scopus 로고
    • Contact degradation in hot/cold operation of direct contact micro-switches
    • Oct.
    • Z. Yang, D. Lichtenwalner, A. Morris, J. Krim, and A. I. Kingon, "Contact degradation in hot/cold operation of direct contact micro-switches," J. Micromech. Microeng., vol. 20, no. 10, p. 105 028, Oct. 2010.
    • (2010) J. Micromech. Microeng. , vol.20 , Issue.10 , pp. 105028
    • Yang, Z.1    Lichtenwalner, D.2    Morris, A.3    Krim, J.4    Kingon, A.I.5
  • 35
    • 33750004656 scopus 로고    scopus 로고
    • Active opening force and passive contact force electrostatic switches for soft metal contact materials
    • Oct.
    • J. Oberhammer and G. Stemme, "Active opening force and passive contact force electrostatic switches for soft metal contact materials," J. Microelectromech. Syst., vol. 15, no. 5, pp. 1235-1242, Oct. 2006.
    • (2006) J. Microelectromech. Syst. , vol.15 , Issue.5 , pp. 1235-1242
    • Oberhammer, J.1    Stemme, G.2
  • 36
    • 79955826249 scopus 로고    scopus 로고
    • Aligned carbon nanotube arrays for degradation-resistant, intimate contact in micromechanical devices
    • May
    • J. Choi, J. Lee, Y. Eun, M. Kim, and J. Kim, "Aligned carbon nanotube arrays for degradation-resistant, intimate contact in micromechanical devices," Adv. Mater., vol. 23, no. 19, pp. 2231-2236, May 2011.
    • (2011) Adv. Mater. , vol.23 , Issue.19 , pp. 2231-2236
    • Choi, J.1    Lee, J.2    Eun, Y.3    Kim, M.4    Kim, J.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.