Design of MEMS vertical-horizontal chevron thermal actuators

Sensors and Actuators, A: Physical

Volumn 153, Issue 1, 2009, Pages 127-130

  Varona, Jorge ^a,b   Tecpoyotl Torres, Margarita ^a   Hamoui, Anas A ^b  

^a UNIVERSIDAD AUTÓNOMA DEL ESTADO DE MORELOS   (Mexico)

^b MCGILL UNIVERSITY   (Canada)

Author keywords

Actuators; Chevron; MEMS; Microfabrication; Thermal

Indexed keywords

EID: 67349140908     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.04.027     Document Type: Letter

References (9)

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