Design, simulation and characterization of an inertia micro-switch fabricated by non-silicon surface micromachining

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1598-1604

  Yang, Zhuoqing ^a   Ding, Guifu ^a   Chen, Weiqiang ^a   Fu, Shi ^a   Sun, Xiaofeng ^a   Zhao, Xiaolin ^a  

^a Shanghai Jiao Tong University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; MICROFABRICATION; MULTILAYERS; SOFTWARE PROTOTYPING; SURFACE TREATMENT;

SHOCK DAMAGE; SNAKE SPRING SECTION;

MICROMACHINING;

EID: 34547691065     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/024     Document Type: Article

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