An acceleration switch with a robust latching mechanism and cylindrical contacts

Journal of Micromechanics and Microengineering

Volumn 20, Issue 5, 2010, Pages

  Guo, Z Y ^a,b   Zhao, Q C ^a   Lin, L T ^a   Ding, H T ^a   Liu, X S ^a   Cui, J ^a   Yang, Z C ^a   Xie, Huikai ^b   Yan, G Z ^a  

^a PEKING UNIVERSITY   (China)

^b University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION IMPERFECTIONS; INSULATION RESISTANCE; LATCHING SWITCH; MICRO ELECTRO MECHANICAL SYSTEM; OFF-AXIS; ON-RESISTANCE; PROOF MASS; RESPONSE TIME; SILICON-ON-GLASS PROCESS;

MICROELECTROMECHANICAL DEVICES;

MEMS;

EID: 77951997765     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/5/055006     Document Type: Article

References (16)

1. Michaelis S, Timme H J, Wycisk M and Binder J 2000 Acceleration threshold switches from an additive electroplating MEMS process Sensors Actuators A 85 418-23
2. Ciarlo D R 1992 A latching accelerometer fabricated by the anisotropic etching of (110) oriented silicon wafers J. Micromech. Microeng. 2 10-3
3. Zhao J, Jia J Y and Chen G Y 2006 A novel MEMS parallel-beam acceleration switch Proc. 2nd IEEE/ASME Int. Conf. Mechatronic and Embedded Systems and Applications (Beijing, China)
4. Go J S, Cho Y-H, Kwak B M and Park K 1996 Snapping microswitches with adjustable acceleration threshold Sensors Actuators A 54 579-83 (Pubitemid 126357015)
5. Ma W, Li G, Zohar Y and Wong M 2004 Fabrication and packaging of inertia micro-switch using low-temperature photo-resist molded metal-electroplating technology Sensors Actuators A 111 63-70
6. Yang Z Q, Ding G F, Chen W Q, Fu S, Sun X F and Zhao X L 2007 Design, simulation and characterization of an inertia micro-switch fabricated by non-silicon surface micromachining J. Micromech. Microeng. 17 1598-604 (Pubitemid 47214521)
7. Guo Z Y, Yang Z C, Lin L T, Zhao Q C, Ding H T, Liu X S, Chi X Z, Cui J and Yan G Z 2009 An acceleration latching switch with multi-contacts independent to the proof-mass Proc. 22nd Int. Conf. Microelectromechanical Systems (Sorrento, Italy) pp 813-16
8. Zhu Y M, Jia J Y and Fan K Q 2006 Design of a micro magnetic acceleration switch Proc. 2nd IEEE/ASME Int. Conf. on Mechatronic and Embedded Systems and Applications (Beijing, China)
9. Hansen B J, Carron C J, Jensen B D, Hawkins A R and Schultz S M 2007 Plastic latching accelerometer based on bistable compliant mechanisms Smart Mater. Struct. 16 1967-72
10. Whitley M R, Kranz M, Kesmodel R and Burgett S 2004 Latching shock sensors for health monitoring and quality control Proc. MEMS/MOEMS Components and Their Applications (Bellingham, WA) p 185
11. Currano L J, Bauman S, Churaman W, Peckerar M, Wienke J, Kim S, Yu M and Balachandran B 2008 Latching ultra-low power MEMS shock sensors for acceleration monitoring Sensors Actuators A 147 490-97
12. Rebeiz G M 2002 RF MEMS Theory, Design, and Technology (Hoboken, NJ: Wiley-Interscience) pp 192-8
13. Younis M I, Jordy D and Pitarresi J M 2007 Computationally efficient approaches to characterize the dynamic response of microstructures under mechanical shock J. Microelectromech. Syst. 16 628-38 (Pubitemid 47241362)
14. Test Method Standard Microcircuits (MIL-STD-883E) available at: http://www.dscc.dla.mil/v/va/docs/mil-std-883/
15. Li Z H, Zhang D C, Li T, Wang W and Wu G Y 2000 Bulk micromachined relay with lateral contact J. Micromech. Microeng. 10 329-33
16. Dong J, Li X, Wang Y, Lu D and Ahat S 2002 Silicon micromachined high-shock accelerometers with a curved-surface application structure for over-range stop protection and free-mode-resonance depression J. Micromech. Microeng. 12 742-46 (Pubitemid 35359535)