An acceleration switch with a robust latching mechanism and cylindrical contacts

Journal of Micromechanics and Microengineering

Volumn 20, Issue 5, 2010, Pages

  Guo, Z Y ^a,b   Zhao, Q C ^a   Lin, L T ^a   Ding, H T ^a   Liu, X S ^a   Cui, J ^a   Yang, Z C ^a   Xie, Huikai ^b   Yan, G Z ^a  

^a PEKING UNIVERSITY   (China)

^b J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION IMPERFECTIONS; INSULATION RESISTANCE; LATCHING SWITCH; MICRO ELECTRO MECHANICAL SYSTEM; OFF-AXIS; ON-RESISTANCE; PROOF MASS; RESPONSE TIME; SILICON-ON-GLASS PROCESS;

MICROELECTROMECHANICAL DEVICES;

MEMS;

EID: 77951997765     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/5/055006     Document Type: Article

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