Development of carbon nanotubes contact-based linear displacement sensor with large sensing range

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 627-630

  Lee, Jae Ik ^a   Choi, Jungwook ^a   Lee, Kyounghoon ^a   Jeong, Bongwon ^a   Kim, Jongbaeg ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT AREAS; DIRECTION OF MOTION; DISPLACEMENT SENSOR; LINEAR DISPLACEMENT SENSOR; OUTPUT CURRENT; SENSING RANGES; TEMPERATURE FLUCTUATION; VERTICALLY ALIGNED CARBON NANOTUBE;

MEASUREMENT ERRORS; MECHANICAL ENGINEERING; MECHANICS; MICROSTRUCTURE; REACTIVE ION ETCHING; SENSORS; SYNTHESIS (CHEMICAL);

CARBON NANOTUBES;

EID: 77952746551     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442330     Document Type: Conference Paper

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