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Journal of Micromechanics and Microengineering

Volumn 10, Issue 2, 2000, Pages 120-123

Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications

(4) Michaelis, Sven a Timme, Hans Jörg a Wycisk, Michael b Binder, Josef b

a INFINEON TECHNOLOGIES AG (Germany)

b UNIVERSITY OF BREMEN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; AUTOMOTIVE INDUSTRY; CMOS INTEGRATED CIRCUITS; COST EFFECTIVENESS; ELECTROPLATING; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; OPTICAL SWITCHES; RELIABILITY;

ACCELERATION THRESHOLD SENSOR; ACCELERATION THRESHOLD SWITCHES; MICROELECTROMECHANICAL SYSTEMS;

MICROELECTRONIC PROCESSING;

EID: 0033688283 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/10/2/304 Document Type: Article

Times cited : (107)

References (7)

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3
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4
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- Simulation, design and fabrication of electroplated acceleration switches
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5
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6
- 0343945519
- Verkappung von sensorbauelementen mittels Niedertemperatur-Siliziumbonden
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7
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- New sensor on-chip technology for micromechanical acceleration-threshold switches
- Queensland, Australia, October 1999
- Wycisk M, Toennesen T, Binder J, Michaelis S and Timme H-J 1999 New sensor on-chip technology for micromechanical acceleration-threshold switches Microelectronics and Micro-Electro-Mechanical Systems (Queensland, Australia, October 1999) pp 112-20
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- Wycisk, M.¹ Toennesen, T.² Binder, J.³ Michaelis, S.⁴ Timme, H.-J.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.