Micro-cantilever shocking-acceleration switches with threshold adjusting and 'on'-state latching functions

Journal of Micromechanics and Microengineering

Volumn 17, Issue 3, 2007, Pages 567-575

  Jia, Mengjun ^a   Li, Xinxin ^a   Song, Zhaohui ^a   Bao, Minhang ^b   Wang, Yuelin ^a   Yang, Heng ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; COMPUTER SIMULATION; ELECTROSTATIC FORCE; MICROFABRICATION; MICROMACHINING;

LATCHING FUNCTIONS; MICROMECHANICAL SHOCK SWITCH; RESPONSE FREQUENCY; SHOCKING FORCE; STATE LATCHING ABILITY;

MEMS;

EID: 34249048951     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/3/020     Document Type: Article

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