Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film

Nanoscale Research Letters

Volumn 6, Issue , 2011, Pages 1-5

  Shin, Ju Hyeon ^a   Lee, Seong Hwan ^a   Byeon, Kyeong Jae ^a   Han, Kang Soo ^a   Lee, Heon ^a   Tsunozaki, Kentaro ^b  

^a Korea University   (South Korea)

^b ASAHI GLASS CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTI-STICTION COATING; FLUORINATED POLYMERS; HIGH FIDELITY; HIGH THROUGHPUT; HOT EMBOSSING PROCESS; LOW SURFACE ENERGY; NANO-SIZED; NANO-SIZED PATTERNS; PET FILMS; PRODUCTION COST; SI SUBSTRATES; SURFACE PROTRUSION; UV NANOIMPRINT LITHOGRAPHY; UV-CURING; UV-NANOIMPRINT; VARIOUS SUBSTRATES;

CURING; FLUORINE CONTAINING POLYMERS; MOLDS; NANOIMPRINT LITHOGRAPHY; PLASTIC COATINGS; POLYETHYLENE TEREPHTHALATES; POLYMERS; SILICON; SURFACE CHEMISTRY; SURFACES; THROUGHPUT;

SUBSTRATES;

EID: 84860377631     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-6-458     Document Type: Article

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