Fabrication of sub-100 nm sized patterns on curved acryl substrate using a flexible stamp

Japanese Journal of Applied Physics

Volumn 47, Issue 5 PART 1, 2008, Pages 3699-3701

  Hong, Sung Hoon ^a   Han, Kang Soo ^a   Byeon, Kyeong Jae ^a   Lee, Heon ^a   Choi, Kyung Woo ^b  

^a Korea University   (South Korea)

^b Korea Institute of Nuclear Safety (KINS)   (South Korea)

Author keywords

Curved substrate; Flexible stamp; Hot embossing; Nanoimprint; Nickel foil stamp

Indexed keywords

NICKEL; NICKEL ALLOYS; SILICON; SUBSTRATES;

CURVED SUBSTRATE; FLEXIBLE STAMP; HOT EMBOSSING; NANOIMPRINT; NICKEL FOIL STAMP;

NANOIMPRINT LITHOGRAPHY;

EID: 55049128077     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.3699     Document Type: Article

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