Improvement of resolution in x-ray lithography by reducing secondary electron blur

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 1, 2004, Pages 126-130

  Kise, K ^a   Watanabe, H ^a   Itoga, K ^a   Sumitani, H ^a   Amemiya, M ^b  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b CANON INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE; COMPUTER SIMULATION; ELECTRON SCATTERING; ELECTRONS; MONTE CARLO METHODS; ORGANIC POLYMERS; SILICON; SIMULATORS; SYNCHROTRON RADIATION;

ENERGY DEPOSITION; RESISTS; SECONDARY ELECTRON BLUR;

X RAY LITHOGRAPHY;

EID: 1642291429     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1635847     Document Type: Conference Paper

References (13)

1. H. Sumitani, M. Suita, S. Mitsui, H. Aoyama, K. Fujii, T. Taguchi, and Y. Matsui, J. Vac. Sci. Technol. B 19, 2448 (2001).
2. S. Tsuboi, Y. Nakayama, H. Sumitani, Y. Tanaka, and T. Iwamato, J. Vac. Sci. Technol. B 19, 2416 (2001).
3. K. Deguchi, K. Miyoshi, M. Oda, and T. Matsuda, J. Vac. Sci. Technol. B 14, 4294 (1996).
4. K. Kise, K. Marumoto, H. Watanabe, K. Itoga, T. Kumada, H. Sumitani, T. Kitayama, M. Amemiya, Y. Watanabe, and K. Uda, J. Vac. Sci. Technol. B 20, 2953 (2002).
5. H. Betz, K. Heinrich, A. Heuberger, H. Huber, and H. Oerterl, J. Vac. Sci. Technol. B 4, 248 (1985).
6. M. Gryzinski, Phys. Rev. A 336, 138 (1965).
7. N. F. Mott and H. S. W. Massey, The Theory of Atomic Collisions (Oxford University Press, London, U.K., 1965).
8. K. Rise, M. Amemiya, H. Watanabe, K. Itoga, H. Yabe, and H. Sumitani, Jpn. J. Appl. Phys. (to be published).
9. A. E. Grun, Z. Naturforsch. A 12, 85 (1957).
10. K. Itoga, K. Marumoto, T. Kitayama, H. Sumitani, M. Amemiya, and Y. Watanabe, J. Vac. Sci. Technol. B 19, 2439 (2001).
11. H. Sumitani, K. Itoga, M. Inoue, H. Watanabe, N. Yamamoto, K. Marumoto, and Y. Matsui, Proc. SPIE 2437, 94 (1995).
12. Y. Seo, C. Lee, Y. Seo, H. Noh, H. Kim, and O. Kim, J. Vac. Sci. Technol. B 18, 3349 (2000).
13. L. Ocola and F. Cerrina, J. Vac. Sci. Technol. B 11, 2839 (1993).