Robust control of a parallel-kinematic nanopositioner

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 130, Issue 4, 2008, Pages 0410071-04100715

  Dong, Jingyan ^a   Salapaka, Srinivasa M ^a   Ferreira, Placid M ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOPS; CONTROL APPROACHES; CONTROL DESIGNS; CONTROL LOOPS; COUPLED DYNAMICS; FLEXURE HINGES; FREQUENCY-DOMAIN (FD); HIGH BANDWIDTH; KINEMATIC MECHANISM; LOW DEGREE; MODEL IDENTIFICATION; MULTIPLE INPUT AND MULTIPLE OUTPUT (MIMO); NANO MANIPULATION; NANO POSITIONING STAGE; NANO-MANUFACTURING; NANO-POSITIONING SYSTEMS; PHYSICAL MODEL (PM); POSITIONING ACCURACIES; ROBUST CONTROL THEORY; SINGLE-AXIS; TIME-DOMAIN IDENTIFICATION;

ACTUATORS; AUTOMATION; CELLULAR RADIO SYSTEMS; CONTROL THEORY; DYNAMICS; HINGES; KINEMATICS; MACHINE DESIGN; MECHANISMS; METHOD OF MOMENTS; MILITARY DATA PROCESSING; MIM DEVICES; MULTIPLEXING; NANOSTRUCTURED MATERIALS; PIEZOELECTRIC ACTUATORS; ROBUST CONTROL; STAGES; TELECOMMUNICATION SYSTEMS; THICKNESS MEASUREMENT; UNCERTAINTY ANALYSIS;

IDENTIFICATION (CONTROL SYSTEMS);

EID: 47749124993     PISSN: 00220434     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2936861     Document Type: Article

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