Precision Positioning of Wafer Scanners Segmented Iterative Learning Control for Nonrepetitive Disturbances

IEEE Control Systems

Volumn 27, Issue 4, 2007, Pages 20-25

  Mishra, Sandipan ^a   Coaplen, Joshua ^a   Tomizuka, Masayoshi ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ITERATIVE METHODS; LASER BEAMS; LEARNING SYSTEMS; SILICON WAFERS;

ITRERATIVE LEARNING CONTROL; OPTOMECHANICAL DEVICE; TRAJECTORY-FOLLOWING ERROR; WAFER SCANNERS;

SCANNING;

EID: 34547729099     PISSN: 1066033X     EISSN: None     Source Type: Journal    
DOI: 10.1109/MCS.2007.384130     Document Type: Article

References (8)

1. S. Arimoto, S. Kawamura, and F. Miyazaki, “Bettering operation of robots by learning,” J. Robot. Syst., vol. 1, no. 2, pp. 123-140,1984.
2. M. Uchiyama, “Formulation of high-speed motion pattern of a mechanical arm by trial,” Trans. Soc. Instrum. Contr. Eng., vol. 14, no. 6, pp. 706–712 (in Japanese), 1978.
3. D.D. Roover and O. Bosgra, “Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system,” Int. J. Control, vol. 73, no. 10, pp. 968–979, 2000.
4. C.V. Oosten, O. Bosgra, and B. Dijkstra, “Reducing residual vibrations through iterative learning control with application to a waferstage,” in Proc. 2004 American Control Conf., Boston, MA., July 2004, pp. 5150–5155.
5. M. Togai and O. Yamano, “Analysis design of an optimal learning control scheme for industrial robots: A discrete system approach,” in Proc. 24th Conf. Decision Control, Ft. Lauderdale, FL., Dec. 1985, pp. 1399–1404.
6. S. Garimella and K. Srinivasan, “Application of iterative learning control to coil-to-coil control in rolling,” IEEE Trans. Contr. Syst. Technol., vol. 6, no. 2, pp. 281-293,1998.
7. D. Bristow, M.A. Tharayil, and A. Alleyne, “A survey of iterative learning control—a learning based method for high-performance tracking control,” IEEE Control Syst. Mag., vol. 26, no. 3, pp. 96–114, 2006.
8. S. Gunnarsson and M. Norrlof, “On the design of ILC algorithms using optimization,” Automatica, vol. 37, no. 1, pp. 2011–2016, 2001.