Control of MEMS-based scanning-probe data-storage devices

IEEE Transactions on Control Systems Technology

Volumn 15, Issue 5 SPEC. ISS., 2007, Pages 824-841

  Pantazi, Angeliki ^a   Sebastian, Abu ^a   Cherubini, Giovanni ^a   Lantz, Mark ^a   Pozidis, Haralampos ^a   Rothuizen, Hugo ^a   Eleftheriou, Evangelos ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

H control; Multi input multi output (MIMO) systems; Multisensor systems; Nanopositioning; Nanotechnology; Probe storage; State space methods; Time optimal control

Indexed keywords

MULTI-INPUT MULTI-OUTPUT (MIMO) SYSTEMS; MULTISENSOR SYSTEMS; NANOPOSITIONING; PROBE STORAGE; TIME-OPTIMAL CONTROL;

FINITE AUTOMATA; MEMS; MICROELECTROMECHANICAL DEVICES; MULTIPLEXING; NANOTECHNOLOGY; OPTIMAL CONTROL SYSTEMS; PROBES; SCANNING; SENSORS; STATE SPACE METHODS;

SPACE PROBES;

EID: 39349112346     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2006.890286     Document Type: Article

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