Design, characterization, and control of a monolithic three-axis high-bandwidth nanopositioning stage

Proceedings of the 2010 American Control Conference, ACC 2010

Volumn , Issue , 2010, Pages 4949-4956

  Kenton, Brian J ^a   Leang, Kam K ^a  

^a Reno   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; SCANNING PROBE MICROSCOPY;

HIGH BANDWIDTH; HIGH-BANDWIDTH APPLICATION; NANO-POSITIONING STAGES; OPEN-LOOP; PARASITIC MOTION; SLOW SCANNING; THREE-AXIS; VIDEO RATES;

BANDWIDTH;

EID: 77957762125     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/acc.2010.5530933     Document Type: Conference Paper

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