SCOPUS 정보 검색 플랫폼

Journal of Materials Science

Volumn 47, Issue 8, 2012, Pages 3516-3521

Effect of temperature on the properties of Al:ZnO films deposited by magnetron sputtering with inborn surface texture

(2) Li, Weimin a Hao, Huiying a

a CHINA UNIVERSITY OF GEOSCIENCES (China)

Author keywords

[No Author keywords available]

Indexed keywords

AZO FILMS; EFFECT OF TEMPERATURE; ETCHING PROCESS; GLASS SUBSTRATES; GRAIN SIZE; HIGH TRANSMITTANCE; LINEAR RELATIONSHIPS; POWER DENSITIES; PROPERTIES OF AL; ROOM TEMPERATURE; ROOT MEAN SQUARE ROUGHNESS; SPUTTERING PARAMETERS; SUBSTRATE TEMPERATURE; SURFACE TEXTURES; WORKING PRESSURES;

ATOMIC FORCE MICROSCOPY; CARRIER CONCENTRATION; ELECTRIC PROPERTIES; OPTICAL FILMS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; X RAY DIFFRACTION; ZINC OXIDE;

TEXTURES;

EID: 84857641378 PISSN: 00222461 EISSN: 15734803 Source Type: Journal
DOI: 10.1007/s10853-011-6196-y Document Type: Article

Times cited : (10)

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