Amorphous silicon solar cells on natively textured ZnO grown by PECVD

Thin Solid Films

Volumn 392, Issue 2, 2001, Pages 315-319

  Loffler J ^a   Groenen, R ^b   Linden, J L ^c   Van de Sanden, M C M ^b   Schropp, R E I ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c TNO   (Netherlands)

Author keywords

Plasma processing and deposition; Silicon; Solar cells; Zinc oxide

Indexed keywords

AMORPHOUS SILICON; GROWTH (MATERIALS); PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; ZINC OXIDE;

EXPANDING THERMAL PLASMA CHEMICAL VAPOR DEPOSITION;

SILICON SOLAR CELLS;

EID: 0035974534     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01050-1     Document Type: Conference Paper

References (13)