Effects of substrate temperature on the properties of facing-target sputtered Al-doped ZnO films

Solar Energy Materials and Solar Cells

Volumn 91, Issue 8, 2007, Pages 659-663

  Li, Wei ^a   Sun, Yun ^a   Wang, Yaxin ^a   Cai, Hongkun ^a   Liu, Fangfang ^a   He, Qing ^a  

^a NANKAI UNIVERSITY   (China)

Author keywords

DC magnetron sputtering; Facing targets; Substrate temperature; ZnO:Al films

Indexed keywords

ALUMINUM; DEPOSITION; DOPING (ADDITIVES); MAGNETRON SPUTTERING; SUBSTRATES; THERMAL EFFECTS; ZINC OXIDE;

DC MAGNETRON SPUTTERING; FACING TARGETS; SUBSTRATE TEMPERATURE; ZNO:AL FILMS;

THIN FILMS;

EID: 33947153098     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2006.11.018     Document Type: Article

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