Deposition of ZnO thin films by magnetron sputtering for a film bulk acoustic resonator

Thin Solid Films

Volumn 435, Issue 1-2, 2003, Pages 179-185

  Lee, Jae Bin ^a   Kim, Hyeong Joon ^b   Kim, Soo Gil ^c   Hwang, Cheol Seong ^b   Hong, Seong Hyeon ^b   Shin, Young Hwa ^c   Lee, Neung Hun ^c  

^a Sangsin Electronics Co Ltd   (South Korea)

^b Seoul National University   (South Korea)

^c Gachon University College of Medicine   (South Korea)

Author keywords

Film bulk acoustic resonator; Langmuir probe; RF sputtering; ZnO

Indexed keywords

ACOUSTIC RESONATORS; ELECTRIC CONDUCTIVITY; ELECTRODES; MAGNETRON SPUTTERING; MICROSTRUCTURE; PIEZOELECTRIC MATERIALS; PLASMA DENSITY; SURFACE ROUGHNESS; ZINC OXIDE;

SOLID MOUNTED RESONATORS (SMR);

THIN FILMS;

EID: 0038685672     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00347-X     Document Type: Conference Paper

References (5)

1. Wang J.S., Landin A.R., Lakin M.M. 1983 IEEE Ultrasonics Symposium. 1983;. p. 491.
2. Driscoll M.M., Moore R.A., Rosebaum J.E. 1986 IEEE Ultrasonics Symposium. 1986;. p. 365.
3. Kline G.R., Lakin K.M. 1983 IEEE Ultrasonics Symposium. 1983;. p. 495.
4. Barens J.O., Leary D.J., Jordan A.G. J. Electrochem. Soc. 127:1980;1636.
5. Lee Y.E., Lee J.B., Kim Y.J., Yang H.K., Park J.C., Kim H.J. J. Vac. Sci. Technol. A. 14:(3):1996;1943.